Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with strain relief L3 U side D side Connector entry direction switch 6.6 (3.2) 101.2

SYJ300-OMU0003

Assy 5 G V111 T S (DC24V,12V) Z *W R () U () 5 DC24V *AC S *RU DC *Z 6 DC12V V DC6V S DC5V G 300m R DC3V H 600m 1 AC100V50/60Hz )V111 CE L -Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8 1 W *M8 P13P14 *P13P14 5 D V115 5 DC24V 6 DC12V S () 1 AC100V50/60Hz Z () *DOZYOZ *AC S 2 AC200V50/60Hz 3 AC110V50

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Assembly 1) Terminal box e connected with housing r should be reinstated.

MGC

MXQ MXF MXW MXP MG MGP MGQ MGG MGCLl50-R Stroke MGC MGF CY1 MY1 3.20-7 Series MGC Allowable Tip Load and Deflection Slide bearing MGCMl20-R Stroke MGCMl25-R Stroke MGCMl32-R Stroke MGCMl40-R Stroke MGCMl50-R Stroke 3.20-8 Compact Guide Cylinder Series MGC Allowable Tip Load and Deflection Ball bushing bearing MGCLl20-R Stroke MGCLl25-R Stroke MGCLl32-R Stroke CL MLGC CNA CB CV/MVG CXW CXS

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

RZQ

To confirm this distance of an extra travel (overrun) in Graph 3 , Lines q to r can be selected from the following table.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Product weight [kg] Model Stroke Additional weight Size Motor type 50 100 150 with lock 16 V6 1.85 2.24 0.30 25 V7 3.68 4.28 5.68 0.60 -8- 1.3 Construction LESYH*R / LESYH*L R type as shown L type opposite as shown Cables includid A-A (D type) Component parts No. Description Material Remarks No.

VQ5000

Note 3) Available only with F , L and T1 kits. Note 4) Specify the wiring specifications on the manifold specification sheet. (Except L kit) . . . . . . Minimum number of stations depends on the kit. (Refer to the table below.)

VK300

Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 4-5-10

IDX-OM-W020

9 R 9-1 9-2 IDFB4E 15E-11-R 15A 30mA 9-3 IDFB Series 9-1 9 1 IDX-OM-W020 9 R IDFB4E to 11E 0.37inch (9.5mm) L N PE GFCI 0.25inch (6.5mm) IDFB15E 0.37inch (9.5mm) L N PE GFCI 0.25inch (6.5mm) IDFB Series 9-2 9 2 IDX-OM-W020 10 S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11

VQZ100V-OMT0001

R 200cm3/min (0.5MPa) PE ? ? 15 No.VQZ100V-OMT0001 No. () 1ISO VG 32 R ? ? ?

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Clean Air Module

Digital Flow Switch Unit Specifications Detection type Heat type Measured flow range 50 to 500 L/min 5 to 100 L/min Minimum unit setting 5 L/min 1 L/min Accumulated pulse flow rate exchange value (Pulse width: 50 [ms]) 5 L/pulse 1 L/pulse Accumulated flow range 0 to 9 L 5% F.S. or less (15 to 35C: Based on 25C) Linearity 2% F.S. or less Repeatability 5% F.S. or less (15 to 35C: Based on 25C

3-Position Rotary Table

Follow the appropriate procedure (R or L) shown in Table 2.

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.