VK3000

VK300-82-2-01 VK300-82-2-03 110 VAC 110V 200 VAC 200V VK300-82-2-02 VK300-82-2-04 220 VAC 220V VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 240 VAC 240V 6 VDC 6V 12 VDC 12V 24 VDC 24VD 48 VDC 48VD 3-2-11

Serial Transmission System Series EX250 Series EX500

N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) 24 VDC 5 4 2 A B Note) B 1 5 3 P EA EB N.O N.O C: Locking type (Manual) Note 1) Function 2 2 position double (rubber) 4 position dual 3 port valve (C) Standard type (1 W) High voltage type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y D: Slide locking type (Manual) Note) A B 4 2 C Seal Note 2)

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

LMU100/200 Series Mist Spray Unit

2!3!4Pilot valve !2!3!4Pilot valve 215 23.1 215 13 13 AL800 AL900 ALF ALT AIR AIR BLOW OIL OIL ALD AIR 158 13 13 158 ALB SUP SUP LMU LMU Lubrication plug Lubrication plug SMC SMC ALIP !5Regulator for tank pressure setting !5Regulator for tank pressure setting AEP HEP !6ON/OFF valve for oil mist !7!8ON/OFF valve for air blow !6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !

CLS

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

1) 13(11.5) 8(9) D-A93 19(20) 14.5(15.5) 6.5(7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for auto switch mounting position for stroke end detection.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Size Order No. 11 Socket Carbon steel Electroless nickel plated 16 LE-D-2-2 12 Connect shaft Carbon steel Electroless nickel plated 21 25 LE-D-2-3 13 Rolling bearing 14 Return box Aluminum die-cast Painting Maintenance parts/Grease 15 Return plate Aluminum die-cast Painting Apply for Grease pack 16 Magnet order No. 17 Wear ring holder Stainless Size 25,150st only For Piston rod GR-S-010(10

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

2–4

A B C D A B C D Bore size (mm) Port aperture A 12 (1) (1) (1) 16 (2) (2) (2) B D 20 (2) (2) (2) View from piston rod end 25 (2) (2) (2) 32 C (2) 40 (2) 50 (2) Operating Range Auto Switch Mounting Bracket/Part No. (mm) Reed switch Solid state switch Applicable switch Auto switch model Bore size Bore size (mm) Mounting bracket part no.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

/22-MXP6-10 101 Air slide table MXP/MXPJ6 11221122Dimensions: MXP10 2-M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max. 5.5 20 G Without stroke adjuster N M Max. 3.5 C Stroke: S 2-M3 x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19

HRX-OM-R005

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-R005 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list (2) (4) 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA7 MSUA7-S, SE Scale: 60% Top ports/MSUA7-SE C 8-M4 x 0.7 depth 8 A port B port 67 13 2-M5 x 0.8 14 B 41 50 33 37 4-M5 x 0.8 depth 7 22.5 5 +0.025 0 3H9 A Long groove depth 5 (positioning pin hole) 22.5 47h9 0 0.062 +0.052 0 26H9 36 +0.030 0 3-4H9 depth 4 ( A , B , C ) 4 3 2-5.5 through 3-R2 3-R2 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5

0.5

Ground the F.G. cable with a resistance of 100 or less +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V Brown (2 pcs.) +24 VDC +24 V +24 V +24 V 0 V 0 V DC/DC Power supply 24 VDC Power supply 24 VDC Blue (2 pcs.) 0 V 0 V 0 V DC/DC 0 V Blue (2 pcs.) 0 V 0 V F . G. F . G.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

mounting thread PC LW 2-T counterbore depth E PD 2-P HG NE H NH C NG G TT UU A N 2 x 2-P (Hexagon socket head taper plug) Z + Stroke (mm) Model MY3B16 MY3B25 MY3B40 MY3B63 A B C E G H HG JJ KK L LD LL LW M MM N 41 28.5 3.5 65 5.0 5.0 27 9.5 M4 x 0.7 2 6 18 61 6.0 M4 x 0.7 13.5 61 41.5 5.5 95 7.5 7.4 37 14.0 M5 x 0.8 2 8 25 89 9.5 M5 x 0.8 20.0 90 58.0 8.6 160 12.0 12.0 54 18.0 M6 x 1 2 12

Air Cylinder

Minimum Stroke for Auto Switch Mounting n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 45, 50, 56, 63, 67, 80, 85, 100 2 (Different surfaces, Same surface), 1 15 D-M9m D-M9mW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1 10 D-M9mV D-M9mWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note) 2 (Different surfaces, Same surface), 1