SFOD-OMT0005CN

(6) (2) M 24V (1) C 24V 0V (4) DC24V 0V (1)(DC24V) (2)BK RLS (3)BK RLS -26- 6.4 (1)() (3m) SI PWR (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V -27- (2)((1)) DC24V EMG () DC24V 0V Ry Ry: U LK RLS (6) Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V

I

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

MK

6 !7 !8 !

48

Number of needle rotations Dimensions D3 Applicable tubing O.D. d D1 L3 A L4 M T H (Width across flats) L2 L1 Metric Size/Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L41 A2 M Weight [g] Unlocked Locked Unlocked Locked AS121F-M3-02A-X790 2 11.9 5 AS121F-M3-23A-X790 3.2 7.2 17.2 21.7 5.8 15.8 20.3 16.9 13.3 AS121F-M3-04A-X790 4 8.2 AS121F-M3-06A-X790 6 10.4 18.6 23.1 16.5 6 AS121F-M3-01A-X790

Antistatic One-touch Fittings Series KA

(mm) Q L M D Part No. Soft nylon Polyurethane 4 3.2 KAL23-00 17.5 18 20 9.6 10.4 12.8 15.5 16 17 15.2 18.5 20.9 4.3 4.5 5.3 18.5 21 22 KAL04-00 KAL06-00 11.4 11.4 4.2 4.2 3.4 2.9 39.7 39.7 25.0 25.0 14.9 14.9 7 6 3 8 6 KAL08-00 6 6.8 7.5 23 26.5 28.5 11 17 12 10 KAL10-00 KAL12-00 21 Branch Tee: KAT Effective orifice (mm 2) Weight (g) Applicable tube O.D. (mm) Q L M D Part No.

Low Profile Guide Type

Find the value of m max at 300 mm/s in Graph (6) for m3. m L1 2. Static moment M2 = m x g x L1 = 0.5 x 9.8 x 0.05 = 0.245 [Nm] 2 = M2/M2 max = 0.245/3 = 0.082 Investigate M2. M1 and M3 are not required because they are not generated.

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

LEF-OM006xx

) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500, (600) (700), 800, (900), (1000) 50 60 (kg) ) 23 (mm/s) 2) 20500 10250 (mm/s 2) 3,000 (mm) 0.02 (mm) 20 10 (m/s 2) 3) 50/20 () 540 (%) 90 RH

1.63

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Heavy Duty Stopper Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

Rotary Cylinder Series MRQ Size: 32, 40 1

6 !7 !8 !

2/3 Port Valve

N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam Steam Valve SeriesVND 2 Port Valve

CQM

6 !

Air Catch Sensor

Detection side nozzle: 1.0 Detection side piping: 6 X 4 tubing Detection side nozzle: 1.5 Detection side piping: 6 X 4 tubing Detection side nozzle: 2.0 Detection side piping: 6 X 4 tubing 300 300 300 Detection distance (m) Detection distance (m) Detection distance (m) 200 200 200 100 100 100 0 0.1 0.2 0.3 0.3 0.3 0 0.1 0.2 0 0.1 0.2 Supply pressure (MPa) Supply pressure (MPa) Supply pressure

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area Flow direction symbols on body AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 4 Metric size JIS symbol 1/8", 5/32", 3/16" 1/4" Tube O.D.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 depth 2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M

IDX-OM-W038

IDH*6 1 2 AME-EL350 3 AME-EL250 4 O 5 4.2 46 IDH Series I D XO M W 038 5 5 5. 1 O FF O FFO N 2-3 ( 1 /) ( ) 3-1, 3-2 -5+10% 600m m 2-3 ( 1 /) 4-4 IDH Series 51 5. 1 I D XO M W 038 5 4-1 2 3-1 4-1 6-1 N .