CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Precision Regulator Series IR1000/2000/3000

(A set of above nos. q to !5.)

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS120M AS220M-01 AS220M-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Construction Meter-out type AS1200M AS2200M u w u w t e r !0 !1 i q !4 r e !0 !1 q i !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Replacement Actuator (Cylinder) CY1F R B 10 Stroke Cylinder identification symbol Piping direction R L Centralized piping on right Centralized piping on left Thread type Bore size (mm) Symbol Thread type M Rc NPT G Bore size (mm) 10, 15 10 15 25 10 15 25 Nil 25 TN TF 8-16-14 14 Series CY1F Magnetically Coupled Rodless Cylinder Low Profile Guide Type Construction q @0 #3 #2 @4 #0 @6 @5 #4

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Replacement Actuator (Cylinder) CY1F R B 10 Stroke Cylinder identification symbol Piping direction R L Centralized piping on right Centralized piping on left Thread type Bore size (mm) Symbol Thread type M Rc NPT G Bore size (mm) 10, 15 10 15 25 10 15 25 Nil 25 TN TF 8-16-14 14 Series CY1F Magnetically Coupled Rodless Cylinder Low Profile Guide Type Construction q @0 #3 #2 @4 #0 @6 @5 #4

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Union Tee: KPQT, KPGT D 3 x Applicable tubing Effective area mm2 D Model L Applicable tubing O.D. mm Note 1) Weight g M Q TPH TPS 4 L Q M D D KPGT04-00 KPQT04-00 10.4 7 4 4 17 4.5 19.7 6 KPGT06-00 KPQT06-00 12.8 9 10 10 18.5 5.3 21.8 8 KPGT08-00 KPQT08-00 15.2 16 18 26 20.5 6 25.3 4.2 8 10 KPGT10-00 KPQT10-00 18.5 25 29 41 23 6.8 28.4 M M L L 12 KPGT12-00 KPQT12-00 20.9 29 46 58 24 7.5 30.4

Stainless Steel 316

Construction q w Material No.

Plug-in Unit

L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no. (arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

Precautions 1

M32 x 2 42.5 21.5 14 41 22 21 24 Up to 300 32 M14 x 1.5 (mm) Z TZ TY TX TT TD S QY Q ZZ Bore size (mm) 20 25 32 40 108 52 32 32 10 8 62 14 19.8 118 112 60 40 40 10 9 62 14 22 122 114 60 40 40 10 9 64 16 25.8 124 77 53 53 11 10 88 16 29.8 154 143.5 DIN Terminal Double Solenoid Max. 21 Max. 10 89 56.5 49.5 Min. 18 Manual override Applicable cable O.D. 3.5 to 7 Manual override For the mounting

CE

Output terminal q w e r t Preset No. 6 7 8 9 10 For example, when bank 2 is selected, presets 6 through 10 are valid and when the count value coincides with the setting value of 6 through 10, the respective output terminals q through t are turned ON. Prescale Function This function allows free setting of how many millimeters will indicate one pulse.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Y GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 M10 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL 87 100 LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30