Precautions 1

4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

CV/MVGQ

110 75 90 100 110 Different sides MK(2) 2 Same side (n 2) 2 20 + 50 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 110 + 50 n = 4, 8, 12, 16 Different sides RS Q G D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90 100 110 35 100 100 100 100 1

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Soft Start-up Valve AV2000/3000/4000/5000 1

16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4,

Fieldbus system IO-Link Master Unit

Signal name Details 1 L+ 24 V (Control and input) 2 I/Q Digital input (PNP) 3 L0 V (Control and input) 4 C/Q IO-Link communication, Digital input (PNP) or Digital output (PNP) 1 5 N.C. Not used 1: Can be changed with parameters. Digital output power supply is used for control / input. (2) EX600-LBB1 M12 5-pin Socket Configuration Pin No.

Multi-Axis Step Motor Controller

1 !2 w e !3 !4 r t y u i !5 !6 No.

Plug-in/Plug Lead: Single Unit

VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Gun Type Ionizer

(Refer to Table 1.) Table 1 Model Applicable tubing O.D.

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Compact Cylinder

After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/4 turn for a port size of M3 x 0.5 or 1/6 turn for a port size of M5 x 0.8. For elbow type fittings, tighten an additional 1/2 turn for a port size of M3 x 0.5 or 1/3 turn for a port size of M5 x 0.8 if gaskets are mounted in two places.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

VDW

VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5 thread depth 5 1 (IN) port Dimensions inside ( ) are for port size 1/8. 2 (N.C.) port LVH LVD LVQ 2-M4 x 0.7 Thread depth 6 LQ LVN Bracket assembly part no.

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Vacuum Pad

across flats 19 5 5 50 5 5 50 B A 6 B A M14 x 1 M14 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 6 4 4 M8 x 1.25 M8 x 1.25 K: Non-rotating D-D J: Rotating D-D Dimensions Dimensions Part no.