PF2D

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to 4 l/min (PF2D504) 1.8 to 20 l/min (PF2D520) 4.0 to 40 l/min (PF2D540) ISA2 IS ZSM Swept flow characteristics Tapered side seal minimizes dead volume to reduce accumulation of liquid pool.

VCW

N.O. q q w w e e r r t y u t y u Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN IN Component Parts Component parts Description Material Description Material No. No.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc.

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Right, Actuator Cable Type: Standard Cable, Actuator Cable Length: 2m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/Lock, Vacuum Port: Both Left and Right, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA1-S, 100~120V, Incremental, Pulse Input, I/O Connector: -

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Driver Type: LECSA2-S, 200~230V Incremental, Pulse Input, I/O Connector: w/Connector

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: R (Right), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 2 (2m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: D (Both Left and Right), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 750mm, Motor Option: w/o Lock, Vacuum Port: Left, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A2 (LECSA2-S, 200~230V Incremental, Pulse Input), I/O Connector:

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: R (Right), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 5 (5m), Driver Type: A1 (LECSA1-S, 100~120V, Incremental, Pulse Input), I/O Connector

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20PAT.

CJP

Without rod end thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Width across flats) Auto switch Mounting nut (Refer to page 6-2-13.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

Thermo-chiller/Rack Mount Type

W: 800 [W] Power supply output VI: 1.0 [kVA] W Efficiency Q = P = Q = P = V x I x Power factor In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 800 0.7 = 1.0 [kVA] x 0.85 = 0.85 [kW] = 850 [W] = = 1143 [W] Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 850 [W] x 1.2 = 1020 [W] 1143 [W

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

Cylinder with Lock

Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 1800 * The manufacturing of intermediate strokes is possible.

Secondary Batteries

2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 Note 1) For strokes exceeding the maximum, consult SMC.

CNG

Standard variations Grommet Standard stroke (mm) D-H7 Bore size (mm) Series Built-in auto switch magnets With rod boot Action Rubber bumper Air cushion Grommet (2 color indication) D-H7W Grommet (2 color indication,latch type with diagnostic output) D-H7LF 20 25 32 40 Cylinder with lock Series CNG Double acting Single rod Grommet (2 color indication, with diagnostic output) D-H7NF Maximum to 800

VK300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) Based on dynamic performance test, JIS B 8374-1981.