10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

Power consumption [W] Note 11)HorizontalVerticalLEYG25MA30, 50, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

consumption [W] Note 11)HorizontalVerticalLEY16A30, 50, 100, 150200, 250, 3000.670.453.6 to 6.7415 to 500300050 or less?

Power consumption [W] Note 11)HorizontalVerticalLEYG25MA30, 50, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

1000m/s2 Insulation resistance 50M or more at 500V DC (between lead wire and case) 1500V AC/min.

ITV-E

S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i t f rom t ouchi ng t he ot her w i res as t hi s can cause a m al f unct i on.

EX600-SDNA_eng

Displays the diagnosis status of the unit. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 Minor communication error. Fatal communication error. The element in SI unit is broken. Connection is not established. Communication is normal. Double checking the node address. Communication error. The power supply for control and input is Off.

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)250 VAC for 1 minute between live parts and case2 M or more between live parts and case (at 50 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (De-energized)100 m/s2 in X, Y, Z directions, 3 times each (De-energized)?