High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

ZP

How to Order B01 H N 40 25 ZPX A18 J Mounting thread Pad diameter (mm) A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 40 50 40 50 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Pad type Buffer stroke (Rotating) H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 N S NBR Silicon rubber 100 Spring Force U Urethane rubber F Fluoro rubber 40 to 80 Pad diameter 100, 125 E EPR 6.9

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

100

) ZL1 Series ZL3/ZL6 Series ZL3m ZL6m (Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0 Break Flow Rate Characteristics (Representative value) Vacuum Breaking Time (Representative

48

Series Variations Model Bearing Bore size Stroke [mm] Cushion Piston speed Port size Mounting direction JMGP 12 (10 x 2) 10, 20, 30, 50, 100 M3 x 0.5 16 (12 x 2) 20 (16 x 2) 20, 30, 50, 100, 150 M5 x 0.8 25 (20 x 2) 50 to 300 mm/s Top 32 (25 x 2) Rubber bumper on both ends Slide bearing Bottom 40 (32 x 2) 1/8 (Rc, NPT, G) 50 (40 x 2) Rear 25, 50, 100, 150, 200 63 (45 x 2) 80 (56 x 2) 50 to

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Series CHN 20, 25, 32, 40 7MPa How to Order CHN 25 100 C73 L Number of auto switches Nil S n 2 pcs. 1 pc.

Air Slide Table Series MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

PFxx-OMU0002

Press the S button for 1 to 3 seconds. Press the S button for 3 to 5 seconds. Press S button once.

Refrigerated Air Dryer

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) Note 2) Voltage symbol 20 (200 VAC) is the terminal block connection as standard. Option S cannot be chosen. Voltage symbol 10 (100 VAC) is the power cable with plug as standard.

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.

PFxx-OMY0005

(2 s or 5 s can be selected) 13 Pressure 0.1 s (Variable at 0 to 30 s/0.01 s step) Temp. 1 s Protection IP65 Environmental Withstand voltage 1000 V AC for 1 minute between terminals and housing resistance Insulation resistance 50 M between terminals and housing (with 500 VDC megger) Operating temperature range Operation: 0 to 50 oC, Storage: -10 to 60 oC (No condensation or freezing) Operating

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Compact Cylinder

Lateral load Eccentric distance Stroke Operating pressure: 0.5 MPa 1000.0 100 Rod end allowable lateral load (N) 100.0 63 Load weight (kg) 50 63 50 40 10.0 10 40 32 32 1.0 0.1 10 100 1000 10 20 40 60 80 100 Stroke + Eccentric distance (mm) Max. speed (mm/s) The allowable lateral load applied to the rod end is as shown above.

HEC_001W-E

E x t e r n a l S e n s o r S a m p l i n g C y c l e M O D E < 1 8 0 s e c 5. Offset Value Setting range : -9.99 to 9.99 C Min. increment : 0.01 C Indicated content : Offset value(Ex. : -0.15 C) Function : It allows the change of the difference between the controller reference value and set value by offset.

AC

X intensified press.ratio) T1[s]: Charge time by P2 and P1 in charge characteristics table T2[s]: Charge time by P3 and P1 in charge characteristics table Z[pc.]: Number of booster regulators Necessary conditions: D[mm]: Cylinder bore size L[mm]: Cylinder stroke W[mm/s]: Cylinder operating speed C[pc.]: Number of cylinders 100 100 200 1 Provide necessary conditions on selection. 29 0.5 0.8

Refrigerated Thermo-chiller

The unit used is [S/m], incorporating [S] (Siemens), the opposite of [] (resistance). At 25C, the electrical conductivity of theoretically 100% deionized water is 0.055 [S/m].

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

Compact Slide Series MXH

L Load center of gravity m Cylinder shaft center Selection Graph (1) to (3) (Vertical Mounting) Graph (1) Maximum Speed 100 (mm/s) or Less Graph (3) Maximum Speed 500 (mm/s) or Less 100 1 10 0.1 20 Mass m (kg) Mass m (kg) 16 10 1 0.01 6 20 16 10 6 0.1 0.001 5 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph (2) Maximum Speed 300 (mm/s) or Less 10 1 Mass m (kg) 20 16