3

(Clamp part) Note 1) 1.4 1.2 0.9 0.7 Note 1) Refer to Rotary Angle figure.

CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) Foot (1) Flange (3) 50 CQ2X50-PS Double clevis 63 DCQ2X63-PS Gasket: 1 pc. 32 40 50 63 80 100 CQ-D032 CQ-D040 CQ-D050 CQ-D063 CQ-D080 CQ-D100 CQ-F032 CQ-F040 CQ-F050 CQ-F063 CQ-F080 CQ-F100 CQ-L032 CQ-L040 CQ-L050 CQ-L063 CQ-L080 CQ-L100 80 CQ2X80-PS Grease pack (10 g): 1 pc. -X 100 CQ2X100-PS Pneumatic Circuit 2.

EX120/121/122

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Seal type Nil E With Without light, with surge voltage suppressor Metal seal Rubber seal 0 1 Coil voltage 1 2 3 Stations Function D side U side 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) R Note 2) Note 1) Applicable to DC specifications.

HRX-OM-R039

Refer to 1.4.1 Product Label and check the part number of the product. 10 A 012 HRSE 1) Cooling capacity 4) Option 012 1000W/1200W (50/60Hz) None Nil 018 1400W/1600W (50/60Hz) High-pressure pump mounted T 024 1900W/2200W (50/60Hz) *1 *1 3)Power supply-10(100V Type)can not be chosen. 3) Power supply 10 1-phase AC100V (50/60Hz) 20 1-phase AC200V (50/60Hz) 2) Cooling method 23 1-phase AC230V

VEX1

1 8 1 4 T NPTF Note) (Only with solenoid) Electrical entry Without sub-plate Nil Rated voltage (Only with solenoid) Symbol Electrical entry 02 03 1 4 3 8 42 Grommet, Lead wire length 300 mm Grommet, Lead wire length 600 mm G H 1 2 3 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 04 1 2 L L plug connector, lead wire length 300

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

VZ5000

valve 02: Rc With sub-plate 1 4 3 position closed center 3 1 4 Note) 5(R1), 3(R2) port: Rc 3(R) port PE port 3 position exhaust center Manual override/Plug-in type Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Rated voltage 4 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 3 position pressure center 4 0 1 0 1 5 24 VDC 12

HRX-OM-X010

-16 1.7.4 Label . 1-16 1.8 Material Safety Data Sheet (SDS) . 1-16 1.8.1 Galden HT135 . 1-17 1.8.2 FluorinertTM FC-3283 . 1-29 1.8.3 Galden HT200 . 1-38 1.8.4 FluorinertTM FC-40 . 1-50 1.8.5 Ethylene glycol aqueous solution 60% . 1-58 1.8.6 Refrigerant R410A . 1-64 1.8.7 Refrigerant R448A . 1-76 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section (1) . 2-1 2.2 Name of Each Section

Short Stroke Electric Actuator Series LX

For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 50 50 2.1 1.1 0.3 0.1 2.1 1.1 0.3 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 0.6 0.2 0.1 1.1 0.6 0.2 0.1 200 200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

LEC-OM02704CN

*CDV 1 116384 (1) 1/9 CMX/CDV 9 (2) CDVSTN 32767 (3) CMXCDV 10 (A37) PA06PA07116384 nm PA06 PA07 15 74 15 (a) 1 5020 PA0650 PA0720 50 20 (b) 2 50201/9 50 20 50 450 1 9 20 PA06450 PA0720 20 1/9 15 75 15 (7) PA08 ATU 0001h PA09 RSP 12 132 8.2 (a) (PA08) PA08 0 0 0 PB0 8 PB0 9 PB 1 0 0 PB0 6 PB0 7 PB0 8 PB0 9 PB 10 PB0 6 1 1 PB0 7 PB0 8 PB0 9 PB 1 0 2 2 3 .

Air-hydro Unit

25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24

Digital Flow Switch (Integrated display type) ( compatible)

Nominal thread size Tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Rc(NPT)1 1/4 40 to 42 Nm Rc(NPT)1 1/2 48 to 50 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Refrigerated Air Dryer

45 50 45 50 55 60 65 70 75 80 5 10 15 1.73 1.15 0.59 0.62 1.3 1.07 1 0.72 1 1 1.68 0.81 0.82 0.95 0.88 0.68 0.9 0.95 0.57 0.86 1 0.82 1.06 0.79 1.11 1.16 Data Ambient temperature Data Air flow capacity Series IDF Series IDU Series IDF Correction factor Correction factor Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E Ambient temperature (C) Ambient temperature (C) 25 30 32 35 40 25 30

CC

1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S

MK

50 to 200 mm/s Piston speed Non-rotating accuracy 1.2 0.9 0.7 ML1C Note 1) Max. bending moment applied to the piston rod side.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !