Tamper Proof and Flat Head Screw

In-line type AS1001F AS2001F AS2051F AS3001F AS4001F 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 Dual speed controller ASD230F ASD330F ASD430F ASD530F ASD530F ASD630F 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 1/8 1/4 1/4 3/8 1/2 Applicable cylinder bore size (mm) Piping side port size Cylinder side port size Model AS1200 AS2200 AS3200 AS4200 M5 1 2 1/8 1/4 3/8 1/2 3/4 1 1

MHK2

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

MHK2

MHK2-20 20 10 Standard: Chloroprene rubber (CR) Black Optional: Fluoro rubber (FKM) Black Silicon rubber (Si) White MHK2-25 25 14 Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 MHKL2-12 12 11 Standard stroke 4 6 10 14 11 14 18 22 MHKL2-16 16 14 Long stroke type Series MHKL2 MHKL2-20 20 18 MHKL2-25 25 22 12-6-2 12-6-3 3 Wedge Cam Operation Slide Guide Air Gripper Series

Fluoropolymer Tubing Variations

Fittings: Fluoropolymer fittings LQ series Fluid Note 1) 2) 3) and applicable fittings Note 1) 2) 3) Fluid: Air, Water, Inert gas Fittings: One-touch fittings KQ2, KQG2, Clean One-touch fittings KP, KP Insert fittings KF, KFG2, Miniature fittings M, MS (Hose nipple type) Max. operating pressure (MPa) Refer to the max. operating pressure curve. 10 7 20 15 20 15 35 20 35 20 60 40 95 60 100

53

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating fluid Note 2) Tap water, 15%

Bag Filter

FGF-OP05 Hexagon nut d FGF1-20 16 40 71 31.5 400 R d1 FGF3-40 AI-3S M20 20 50 90 40 500 FGF5-60 S Note) 3 foundation bolts are required per filter unit. If ordering only foundation bolts, order 3 bolts using the above part number.

15

Operating Range Auto Switch Mounting Bracket (Switch spacer) Auto switch model Bore size (mm) 6 to 40 Auto switch model Bore size (mm) 6 10 15 20 25 32 40 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 3 3 2.5 2.5 3 2.5 3 BMY3-016 D-A9 D-A9V D-A9 D-A9V 5.5 5.5 5.5 5.5 5.5 5.5 6 Note) Values which include hysteresis are for guideline purposes only, they are not a

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01 (Lead H: 0.02) Lost motion [mm]*2 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2]*3 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size m42 m56.4

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

+0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS

CLQ

CLS Manually unlocking 20 to 32 CLQ Manual unlocking bolt Manual unlocking bolt MLGP Locking direction Locking direction RLQ Only 20 to 32 MLU Lock ring Lock ring 1) Confirm that there is no air pressure inside the cylinder, and remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to unlocking port (2) shown in the drawing on the left. 3) Remove the unlocking bolt (3) with

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B

Vacuum Pad: Ball Joint Type

width across flats 3 E D C 3 2 A B Stroke: 20 to 50 mm Dimensions: 10 mm Stroke A (mm) B C D E F H I J Model ZPR20F10-0-A14 20 22 12.5 15.5 29.3 58.5 46.5 126.5 ZPR25F10-0-A14 25 28 50 ZPR32F10-0-A14 13 16 29.8 59 47 32 35 127 Additional Dimensions by Stroke (mm) (mm) Q: 6 Q: 8 Model H I J R S R S Stroke ZPR20F10-0-A14 20 +10 3 0 ZPR25F10-0-A14 30 +20 +7 12.8 24.3 15.2 26.2 ZPR32F10-0-A14

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

Series MXP Precision Air Slide Table

10 J 6 Mounting base side B D 10 9.5 Across AA MXP10-20 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 2.5 4.7 6-M30.5 15 15 4 deep L (mm) Model G H J K L M N S V W Z MXP10-10 8 32 52.4 20 20 21 6.5 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55%

Compressed Air Preparation Filter

42.5 3 167.4 57.2 Size 40 2 1/4, 3/8, 1/2 145.2 25.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 3 220.4 75.2 Size 50 2 3/4, 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 Size 60 2 1 186.2 32 93.1 30 45 70 50 70 11 20 8 60 80 3 282.4 96.2 25 Modular Connection Example (Dimensions) AFF/AM/AMD/AMK Series Combination example e A Y300T-D S F Line Filter AFF30-03-D 1 pc.

ZR

(Refer to page 13-3-37.)

Guide Cylinder Series MGG

Lead wire length (m) Load voltage Switch mounting screw in-line direction Perpendicular Indicator light Wiring (output) Type Special function Electrical entry Applicable load 0.5 (Nil) None (N) 3 (L) 5 (Z) 20 25 32 40 to 63 80 100 C76 C73 20 to 63 B76 B73 AC DC 5V 3 wire (NPN equiv.)

MRHQ

MHT 24.5 9 Max. 9.2 4-M6 x 1 depth 9 (two on opposite side) 51 MHY M5 x 0.8 Finger opening port 3-R2.5 24 3.4 62 MHW MRHQ 16.5 27 19 26 9 39 36 Misc. 6.5 2-6.5 through 2-11 depth of counter bore 2.8 D8 46 101 10 Angle adjustment bolt 20+0.030 0 3-5H9 depth 6 (one each on three sides) 3-R2.5 12 2 +0.030 0 3-5H9 long groove depth 4 (one each on three sides) 50h9 0 -0.062 M5 x 0.8 Port A M5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

scraper Bore size Stroke Model Model CV 8 12 20 25 32 8 mm 3 6 110 8 MIW8-8D 12 mm MVGQ 20 mm 5 10 240 12 MIW12-12D 25 mm 10 30 650 20 MIW20-20D MIW CC 32 mm 20 30 1550 25 MIS25-25D For MIW, same stroke as bore size RB 35 100 2650 32 MIS32-32D Single finger type: MIS (mm) 62 10 MIS8-10D J 2 3 Bore size Stroke 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 130 10 MIS12-10D D10, 20, 30 mm 3 5 160

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

-25D For MIW, same stroke as bore size RB 35 100 2650 32 MIS32-32D Single finger type: MIS (mm) 62 10 MIS8-10D J 2 3 Bore size Stroke 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 130 10 MIS12-10D D10, 20, 30 mm 3 5 160 20 MIS12-20D 10, 20, 30 mm -X 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350