Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 300 100 200 50 100 20 30 40 50 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance

CE

0u @4 !2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

16 20 25 12 16 20 25 8 8 8 9.5 6.8 6.8 6.9 8.1 #8-32UNC #8-32-UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke sizes, through-hole is threaded over the entire length.

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

Air Fittings & Tubing

3.2 10 14 8 8 10 14 10 10 12 14 17 15.5 3.4 2.9 M5 X 0.8 M6 X 1.0 12.7 13.9 8 4 4 4 1 8 1 4 18 13.5 14.7 14.9 18.5 17 15.5 24 20.5 15.5 26 27.5 22.5 19 28.5 23.5 22 33 27.5 5.6 4 16 M5 X 0.8 M6 X 1.0 10 4 4 13.5 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 6 13.1 10.4 17 14 8 26.1 18.0 18.5 17 26.1 26.1 17 21 10 3 8 41.5 29.5 22 1 2 1 4 19 12 3 8 22 58.3 46.1 30 22 1 2 81 (81) 113 (96)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

(122) 5H9 (+0.030 0 ) depth 5 70 Body mounting reference plane (B dimension range)1 42 4 x M6 x 1, thread depth 9.9 44 5.5 60 5H9 (+0.030 0 ) depth 5 L Cable length 250 (62) A (Table traveling distance)2 62 (142) (2.4) [Origin]4 (4) [2]4 10 (66) [64]4 Stroke 65 64 [(66)]4 (70) 24 2 [(4)]4 48 Origin3 (79) 6.5 Motor cable 30 Auto switch groove5 46.8 60 M4 x 0.7, thread depth 8 (F.G. terminal

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

196 65 14 16 32 ZZ + Stroke LZ CJP Front flange(F)/Locking at head end (Hl) CJ2 Hl/ Rl/ Wl (mm) Cushion valve Stroke range Bore size (mm) CM2 Fd FZ FY FX FT FE FD B 4-FD Port 32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36 72 10 3 9 55 up to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

Compact

Lead wire should be less than 100 meters. 4.

33

*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.

LECA6_C

LE ,, () EMG 1000 1 54 - /Best Pneumatics No UL ,UL1310 Class2 142 55 - 143. 90~100 DC24VSVON a) b) c) d) e) D 100 56 - 144. 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 57 - 145. 5 146. SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4.

A_HEC-OM-J017

setting temperature -4-1 4.3 Reading internal sensor -4-2 4.4 Reading external sensor -4-3 4.5 Reading alarm status -4-3 4.6 Reading temperature average data -4-5 4.7 Offset setting (without writing EEPROM) -4-5 4.8 Reading offset -4-5 4.9 Temperature setting (with writing EEPROM) -4-6 4.10 Offset setting (with writing EEPROM) -4-7 5 Troubleshooting -5-1 6 Communication Format and Examples

Clean Air Module

0 535 LLB3 LLB4 5 100 5 107 IDFA Min. measured flow rate value Max. measured flow rate value 50 500 55 IDFB Connector pin numbers IDH 4 3 ID IDG 2 1 IDK Pin no.

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

125

1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC.

Intrinsically Safe Valve

1) (EA) 5 1 (P) 3 (EB) Lead wire length 3-position pressure center 2 (B) (A) 4 Symbol 3 6 10 15 20 30 100 Lead wire length Note 5 Note 1) 300 mm (EA) 5 1 (P) 3 (EB) 600 mm Maximum length for L-type 1000 mm 4-position dual 3 port valves (N.C.

CC

66 107 116 135 50 24 40 40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of