3M/SMseries

++t&F Eft!

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

S070

1 Barb fitting assembly (for 1(P), 3(R) ports) SS07051A60 Applicable tubing 6/4 Note) Order is accepted in 10 units. 4-11-15 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w e q r < U End Plate Assembly > q U end plate assembly no.

PEEK

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bushing assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 SUY u Spacer 8 i !

Thermo-chiller

Description Size 090 050 Note 1 Filter Rc1 (5 F) V The value in ( ) shows the nominal filtration accuracy. Rc1/2 (5 F) V The value in ( ) shows the nominal filtration accuracy. 2 Filter Rc1/2 (5 F) V V 8 Y-strainer Rc1/2 #40 V V Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, select the particle filter, and then prepare it.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CLQ

F B E (mm) Joint and mounting brackets (A, B type) part nos.

Compact Cylinder with Lock Series CLQ

L F G D Number of auto switches Locking direction Nil S n 2 pcs. 1 pc. n pcs. F B Extension locking Retraction locking Mounting bracket is shipped together, (but not assembled).

Compact Cylinder with Air Cushion and Lock Series RLQ

TH Rear cylinder Port TP w e r t q u i y w e r t q u i y Approx. Max. T1 Approx. Max. T1 Approx. Max. T2 Approx. Max. T2 Approx. T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

Compact Cylinder with Air Cushion

T1 F E B Joint and mounting bracket (A type, B type) part no.

RQ

CU T1 CQS F B E CQM Joint And Mounting Bracket (Type A, Type B) Part No.

Low Friction Cylinders Series MQ

Q F Depth of counterbore RB E J I M0.2 D W B + Stroke K L M0.2 A + Stroke E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F Q W I RA Y J K L M N OB TN TF 10 69.5 M3 x 0.5 M4 x 0.7 10 to 40 61.5 6 6 ( 5.8) 29 9 39.5 38 7 4 5 5 8 20 3.5 6.5 16 80.5 M4 x 0.7 M6 x 1.0 10 to 60 70.5 8 8 ( 7.8) 36 11.5 48.5 47 10 7 5 7 10 25.5 5.4 9 20 89 M5 x 0.8 M6 x 1.0 10 to 60

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.

VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

5 Port Air Operated Valve

Description Material Note Body 1 Aluminum die-casted White Pilot plate 2 Aluminum die-casted Gray : Aluminum die-casted Resin VFA3130-F VFA1120-F End plate 3 White Piston 4 Resin Spool valve 5 Aluminum, HNBR Spring 6 Stainless steel Bracket Assembly Part No. Description Part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

VQ

How to Order Valve VQ1 1 0 5 F Manual override Series VQ Compact 3 port valve Non-locking push flush style Locking slotted style B : Option Actuation 1 2 Normally closed Normally open Electrical entry Plug-in style With indicator light and surge voltage suppressor (Only for plug-in manifold) F Functions Standard (1W) High pressure (1.5W) Low wattage (0.5W) Large flow capacity H Y U Coil

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT 2 x B K E E F G L1 L1 L2 Y H M B Model L2 M N F LQ3B11-F LQ3B12-F LQ3B21-F LQ3B22-F LQ3B31-F LQ3B32-F LQ3B33-F LQ3B34-F LQ3B35-F LQ3B36-F LQ3B41-F LQ3B42-F LQ3B43-F LQ3B51-F LQ3B52-F LQ3B53-F LQ3B61-F LQ3B62-F LQ3B63-F 4 3 M 11 14 3.5 10 9 9.5 28.5 27.5 19.5 18.5 4.8 1/8" (E,E) (E,E) G H 20 18.5 1/8" 1/4" H L1,L1 L1,L1 6 16 20 4 17 16 12 34.5 33.5 6 22 21.5 10 8