VQ20/30

Rectifying device Rectifying device ZNR ZNR 1 (+, ) Series VQ20/30 1 Grommet Black () DC SOL. SOL.

High Power Cylinder Series RHC

30 d d D D C C H B H B B C D d H B C D d H Part no.

High Power Cylinder Series RHC

30 d d D D C C H H B B (mm) Material: Carbon steel (mm) Material: Carbon steel B Part No.

Compact Hydraulic Cylinder Series CH
KGB

95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175 100 (M) 10 (M) 60 M12 x 85l x 60l 85 CHKGB63 5 (M) 15 (M) 65 x 90l x 70l 90 10 (M) 20 (M) 70 x 95l x 75l 95 15 (M) 25 (M) 75 10.4 x 100l x 80l 100 20 (M) 30 (M) 80 x 105l x 85l 105 25 (M) 35 (M) 85 x 110l x 90l 110 30 (M) 40 (M) 90 16 x 115l x 95l 115 35 (M) 45 (M) 95 x 120l x 100l 120 40

air-filter-e

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Air Preparation Equipment

0 to 150 Outstanding mechanical strength, heat resistance and chemical resistance.

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

XL-OMY0002

-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227

JXCx-OMU0026

Product Specifications (P.30) Voltage drop -111No. JXC-OMU0026 Supplement 1.

High Vacuum L Type Valve

Bonnet assembly/construction part number:1 Temperature Valve size specifications 25 40 50 General use XLD25-30-1 XLD40-30-1 XLD50-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H Temperature Valve size specifications 63 80 100 160 General use XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 High temperature XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H Note1) The magnet for auto

XLA- ∗ -F7NJ ∗ - ∗ Series

Bonnet assembly/construction part number:1 Indicator Flange (valve) size 16 25 40 50 With XLA16-30-1H-F7// XLA25-30-1H-F7// XLA40-30-1H-F7// XLA50-30-1H-F7// Without XLA16A-30-1H-F7// XLA25A-30-1H-F7// XLA40A-30-1H-F7// XLA50A-30-1H-F7// Indicator Flange (valve) size 63 80 100 160 Without XLA63-30-1H-F7// XLA80-30-1H-F7// XLA100-30-1H-F7// XLA160-30-1H-F7// With XLA63A-30-1H-F7// XLA80A-30

XL-OMV0002

-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 ** B2401

XLG Series

-30-1H-1 XLG80-30-1H-1 XLG100-30-1H-1 XLG160-30-1H-1 Note1) The magnet for auto switch is not provided.

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLC16-30-1-2 XLC25-30-1-2 XLC40-30-1-2 XLC50-30-1-2 High temperature XLC16-30-1H-2 XLC25-30-1H-2 XLC40-30-1H-2 XLC50-30-1H-2 Temperature Valve size specifications 63 80 General use XLC63-30-1-2 XLC80-30-1-2 High temperature XLC63-30-1H-2 XLC80-30-1H-2 Note 1) Add the seal material symbol

2/3 Port Valve

30 35 57 74 81 34 51 58 39 63 80 90 26 3 8, 1 2 32.5 17.5 20 45.5 118 (136) 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 25.5 41.5 36.5 49.5 133 (150) ( ): N.O. 4.1-24 VXD21/22/23 Dimensions (Orifice size 35mm, 40mm, 50mm) Energized Open/VXD2270, 2380, 2390 Energized Closed/VXD2272, 2382, 2392 Grommet: G Conduit: C Din connector: D VX VNl VQ Conduit terminal: T Model Grommet Electrical entry Conduit

Electric Actuators

to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80 Page Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 High temperature XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 Temperature Valve size specifications 63 80 General use XLG63-30-1-2 XLG80-30-1-2 High temperature XLG63-30-1H-2 XLG80-30-1H-2 Note 1) Add the seal material symbol

Uniaxial Electric Actuator Series LJ1

0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20 0 2 4 6 8 10 Work