Fieldbus system EtherCAT compatible SI Unit

11 Mounting and Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 21 Specifications 24 Dimensions 25 End Plate Model Indication and How to Order 26 Summary of Product parts 27 Mounting and Installation 29 Wiring 29 Specifications 31 Dimensions 32 Maintenance 42

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Model Selection 1

Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C./N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O.

VCA

Note 2) Vibration resistance Conditions when tested with one sweep of 10 to 300 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states. No malfunction occured when tested.

VCA

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

4

0 3 Series VT307 Dimensions Grommet: VT307-G1 Manual override (Non-locking) 2 x 4.5 (For mounting) (42) (33) 54.5 18.6 (17.2) (14.5) (4.5) (4.5) (28) (37) G: 300 H: 600 (Lead wire length) 40.3 13.5 47.2 10.3 3 13 2 1 1/4", 1/8" (Piping port) 16.5 16.7 25.6 (3.2) 33.2 29.5 25 M4 x 0.7 thread depth 7 (Mounting screw) Note) There is also VT307-H1 (lead wire length: 600 mm).

ChemicalThermo-con

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176 ChemicalThermo-con Series HED Main Specifications (For details, please consult our Product Specifications information.)

Rotary Actuator

mm H: Lead wire length 600 mm M: With lead wire (length 300 mm) L: With lead wire (length 300 mm) Note) S type is not available with AC mode, since a rectifier prevents surge voltage generation.

AMF

520 1093 3 867 AMF800/900/1000 ORIENTATION holes Label Drain Model Connection (Flange) 2B 8B C 2B, 3B, 4B 500 A 330 B 300 D 1070 E 1200 F 1290 G 20 H 720 M16 x l400 Anchor bolt M20 x l500 AMF800 AMF900 400 550 560 745 300 300 1070 1090 1230 1320 1335 1450 24 24 4B, 6B 870 M20 x l500 AMF1000 14-20-48

JXCx-OMT0005CN

(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(L) 13-/22-MXQ20(L) 13-/22-MXQ25(L) 6 4.5 5.5 5.5 13.5 5.5 13.5 1 1 1 9 9 7.5 5 12 32 8 31 8 16 3.5 3.5 7.5 11.5 26.5 27.5 11.5 6 40.5 14.5 40.5 14.5 21.5 24.5 21.5 20 10 10 17 17 36 36 16.5 26 16 16 16 22 29 47 47 7 51.5 20.5 33.5 51.5 20.5 26.5 30.5 20.5 39 29 19 29 27 35 67 70 75 19 8 71.5 23.5 39.5 74.5 77.5 33.5 31.5 43.5 33.5 48 38 28 28 42

CQM

HS A B Reed switch D-A7H D-A80H Solid state switch D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL 32/40/50 (mm) D-F7 D-J79 D-F7 W D-F79F D-J79W D-F7BAL D-A7 H D-A80H D-F7NTL Auto switch model A B Hs 9.5 13.5 11.5 Symbol A B Hs A B Hs 32 40 50 32.5 36 42 11.5 14 17 14.5 18.5 16.5 32.5 36 42 32.5 36 42 6.5 9 12 6.5 9 12 9.5 13.5 11.5 Bore size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PFMC7202 (M3 x 5, 2 pcs.)

PA300/500/700

Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

Compact Type Dual-Rod Cylinder Series CXSJ

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

KS/KX

D2 L A M D1 Nylon Urethane M5 X 0.8 M6 X 1.0 38.5 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed