1.63

speed of 200 mm/s.

Multistage Ejector Series ZL112.212

Rc1 25 ZQ Vacuum pressure gauge Exhaust port ZH P With vacuum pressure gauge ZL212-G ZU V ZL ZY Exhaust port Vacuum adapter Rc 1/8 7 ZF With vacuum adapter ZL212-GN P ZP V SP ZCUK Exhaust port Digital pressure switch for vacuum AMJ With digital pressure switch for vacuum ZL212-D P AMV S V AEP (1900) HEP Section A Related Equipment 2 x 4.4 Mounting hole EJECTOR MULTISTAGE 76 52 8 27 178.5

Dual Rod Cylinder Series CXSJ/CXS

thread type M thread 6 to 25 Nil Rc 1/8 Port location TN TF NPT 1/8 32 G 1/8 50 M9BW CXSJ S M P 6 Number of auto switches Compact type Made to Order (Refer to the below.)

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Compact Rotary Actuator

p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i

XLDV Series

(P) SUP Apply a pressure of 0.3MPa to the pilot port 1(P), energize the initial pumping solenoid valve and loosen the valve S seal assembly fixing screw to remove the valve S seal assembly.

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

C95

speed: V (mm/s) Maximum speed: V (mm/s) Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 63 100 80 200 200 50 40 50 50 100 100 Load weight: m (kg) Load weight: m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed:

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

width across flats 12 M8 x 1.25 Hexagon width across flats 12 M8 x 1.25 Hexagon width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

MLGP

P-80 (JT)

MLGP

P-80 (JT)

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

2/3 Port Valve for Various

Insulation oil A H Polyacetal Note 1) Note 1) Non-leak (10 6 Pam 3/s) Brake oil Water (up to 60C) B P A H Stainless steel Note 1) If using for other fluids, please contact SMC.

C95

: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ 1.11-31 Series C95 Refer to P.5.3-17, 27, 37

ISO Standard Hydraulic Cylinder

S NB TY TY ZZ + Stroke S + Stroke TX M H TZ Stroke range Bore size (mm) V SS BB J K C P F NB A G M MM NA PJ B D E GA GB H MA TD TX TZ S Y Z ZZ 32 54 25 to 800 44 45 33.2 35 12 M6 x 1 7.5 M14 x 1.5 56 45 68 103 5.5 128 153.5 7 1/4 12 23 18 14 46 18 30 43 15 16 60 -0.016 -0.043 40 57 25 to 800 61 63 41.7 37 18 M8 x 1 10 M16 x 1.5 73 63 95 128 6.5 153 185 9 3/8 12 32 22 19 51 22 34 47 19 20

Series IDG

17 IDG3, 5 IDG3H, 5H With fitting for purge air discharge (Option: P) 73 40 Dew point indicator (Option: S) (98) 38 30 Purge air 12 2.3 6 17 22 IN OUT 11 Bracket (Accessory: B) Purge air for dehumidification 140 118 Port size: 1/8, 1/4 (F) (64) Purge air discharge tubing port for dehumidification Applicable tube O.D.: 8 5/16 inch (Maintenance space 100mm or more) IDG10, 20 IDG10H, 20H With

CY1F

/s Piston speed mm/s Piston speed mm/s 4 Series CY1F Vertical Actuation qVertical operation In vertical operation, observe the maximum load mass and the maximum operating pressure shown in the table below to prevent a drop due to slipping off of magnet couplings.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With auto switch: CDS1B With rod boot Width across flats KA ~ = ~ = ~ = S + Stroke ZZ + Stroke ZZ1 + l + Stroke Stroke range Type Bore size (mm) B C A AL K KA M D MM E EA F FA G J N P S (mm) 125 140 160 180 200 250 300 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 15 145 31 115 27 36 90 59