High Vacuum L Type Valve

K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

ZQ-OM01301

5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEC EE FC FE EA EB FA FB *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 34 - Doc.

Standard Combinations

Mounting angle view (-R specification) MPa OUT IN K P C U O S L H to 2 Air Combination Series ACG Accessory/Optional Combinations : Combination available : Combination not available : Varies depending on a model : Available only with NPT thread F.R.L. unit applicable model Combination Option Accessory Symbol D 1 2 3 6 8 J C N R W ACG20 ACG20C ACG20A ACG20B ACG20D ACG30 to to to ACG30C ACG30A

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

MQQ

x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13

Compact Guide Cylinder Series MGQ

U H V R T 2 GB GA C + Stroke L Q 8 B + Stroke TA TB S K J E G A + Stroke MGQM, MGQL Common Dimensions (mm) NN P TN TF Nil Bore size Standard stroke (mm) B C DA G GA GB H J K L MM ML PW Q R (mm) 12 16 20 25 39 29 6 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 14 48 10, 20, 30, 40, 50, 75, 100 43 33 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 16 52 47 37 10 36 10.5 8.5

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Compact Slide Series MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

Modular Type Regulator Series AR

r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107

Low Profile Air Gripper Series MHF2

MHR MHK q MHS r MHC Mounting is possible from 4 directions.

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

MLU

The piston speed may exceed the maximum operating speed of 500mm/s if the piping is directly connected to the cylinder. Please use speed controllers by SMC to adjust the piston speed so that it will not exceed 500mm/s.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

R.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load mass kg Load mass kg m s m s Type of impact s m 1 m 2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E + E Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8m/s) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact with the

KC

thread R M5 x 0.8 Note) Weight (g) Model tubing D2 L1 L2 D1 VMG O.D.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Sine Rodless Cylinder Series REBR Direct Mount Type

Sine Rodless Cylinder Series REBR Direct Mount Type/15, 25, 32 How to Order REB R 25 300 Z73 Number of auto switches Sine rodless cylinder 2 pcs. Nil 1 pc. S n "n" pcs.