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0 y !3 !5 @3 !0 !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

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Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

ZP

Y A J K B Y C D Misc.

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Made to Order

Applicable rod end nut Bore size (mm) I type single knuckle I-12 I-14 I-16 I-18 I-20 I-25 I-30 Y type double knuckle Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 Y-30 I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 180 200 250 300 NT-12 NT-12 NT-16 NT-18 NT-20 NT-25 NT-30 125 65 100 181 18 CS1 CS2 125 65 105 186 18 140 76 110 198 21 155 83 125 223 23 -X -X 160

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1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Modular F.R.L. Units

When the set pressure is 0.15 MPa or less, the valve q may not open due to the valve spring w force. 100 AW20-B to AW60-B Series AW20K-B to AW60K-B Series Construction AW60(K)-B AW20(K)-B AW30(K)-B/AW40(K)-B w y w y q w y q q IN OUT IN OUT IN OUT u r t i u r t i r e t Drain AW20K-B to AW60K-B (Filter Regulator with Backflow Function) u Drain o i A-A A SMC K P C U O S L H o t Drain A Component

Modular Design with Uniform Body Style

Applicable Models B B Model AW20(K)-D AW30(K)-D AW40(K)-D AW40(K)-06-D AW60(K)-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 How to Order AW D 30 03 X406 q e w y r t X406 0.4 MPa setting X64 Long bowl Option/Semi-standard: Select one each for a to h. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

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YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Possible to transfer a workpiece at low-speed.

10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

5

across flats KA LT LT ZZ + Stroke LS + Stroke S + Stroke N X Y ZZ + Stroke LS + Stroke S + Stroke N X Y N X Y N X Y LX C B LX C B (mm) Bore size (mm) A AL B B1 C D E F G H H1 J K KA LD LH LS LT 40 30 27 60 22 44 16 32 10 15 51 8 M8 x 1.25 6 14 9 40 138 3.2 50 35 32 70 27 52 20 40 10 17 58 11 M8 x 1.25 7 18 9 45 144 3.2 63 35 32 85 27 64 20 40 10 17 58 11 M10 x 1.25 7 18 11.5 50 166 3.2 80

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K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

Best Pneumatics Vol. 14

Note 2) Drain guide is G 1/4 (applicable to AW30 to 40). 1 (4) AW20(K) to 40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) AW30(K)/40(K) AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) PPA 2 6 8 C J (5) AL N R W Port size Z (6) AW20(K) to 40(K) Body size Symbol Port size When more than one specification is required, indicate in ascending alphanumeric order.

ZP3

Type/ZP3-Y ZP3-Y(J/K)-B ZP3-YJP-B ZP3-YK(15/20)-B ZP3-Y-(02/04/06) ZP3-Y-(U2/U4/U6) Vacuum inlet o o y y t t Vacuum inlet u u i y t Component Parts u No.

Aluminum High Vacuum Angle Valve

How to Order q w e r t y u XLA M9N 16 A XLA q Flange size Size w Flange type e Indicator/Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63, 80 63, 80, 100, 160 Symbol Nil D Symbol Nil A F G J K L M Pilot port direction Indicator Without indicator Right flange surface Left flange surface 16 25 40 50 63 80 100 160 Flange side Flange side Left