7

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N P P P p p IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9P P P P p p 2-wire 12 V M9B P P P p p 3-wire (NPN) 5 V, 12 V M9NW P P P p p IC circuit 3-wire (PNP) M9PW P P

HRX-OM-W002

3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser Circuit Protector R C1 E CT 1 14AWG G/Y G1 [ ] CP R 1 1 [ ] R [ ] 14AWG BK 14AWG BK N (CN4) N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 (CN2) WH BK 3 12 12 3 3 BR 11 11 6 1/2 (CN1) 4

5 Port Solenoid Valve Series SQ1000/2000

4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5

IDX-OM-W011

MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS FM FM PRS P P MC TDR MC TDR I D F11E10T AC100/100,110V (50/60Hz) L N 1 3 2 PE TB MC TDR ILS TDR MC OLR MC C01 CM PTC MC FM C11 PRS P TDR MC CM PTC PTC C01 FM PRS C02 O LR TB C11 I LS TDR M C I D F Seri es 145 14 3 I D XO M W 011 14 T I D F15E110T I D F15E120T L N PE 1 2 3 TB N L PE 1 2 3 TB MC MC TDR

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

control equipment Filter, Pressure control equipment Air preparation equipment (Pitch) P=10.5 11.5 5 5 10 11.6 3 1 3 1 21.5 <30.9> 27[34] 25 + + + + + L2 3 (For mounting) 2-3.5 (1, 3 port) M5 x 0.8 1 G: Approx. 300 H: Approx. 600 32.4[34.6] L1 <34.6> (Lead wire length) (Light/surge voltage suppressor) (Station n) (Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector

MB

Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Bore size (mm) 32 40, 50, 63 80, 100 Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N C76 C85 e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release. If mounting is done with lock engaged, lock mechanism may be damaged.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

40 Pilot EXH 177.5 14 (3(R) port) 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 1 3 Manual override 23 9 19 3(R) port 1(P) port Conduit terminal VFN212N-lTll-02l-l-l Grommet VFN212N-lGll-02l-l-l Surge voltage suppressor (With "S") 137 41.7 300 19 23 Indicator light (With "Z") 74(Without "Z": 64) 64(Without "Z": 54) Grommet terminal VFN212N-lEll-02l-l-l Lead wire O.D. 3.5 at max.

HRX-OM-X084

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Soft Start-up Valve AV2000/3000/4000/5000 1

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

2/3 Port Valve

=2.4): P 0.08MPa VNH133AB(Cv=1.7): P 0.16MPa VNH413AB(Cv=1.4): P 0.23MPa VNH313AB(Cv=1.0): P 0.45MPa VNH213AB(Cv=0.7): P 0.9MPa VNH113AB(Cv=0.4): P 0.8MPa Calculation by Cv factor Q=14.2 Cv .l/min 10.2P G Calculation by effective area Q=0.8 S .l/min 10.2P G (Symbol) Q : Flow rate(l/min) P : Pressure differential P1-P2(MPa) P1 : Primary pressure(MPa) P2

PSE530/200

[101 to 101 kPa] 0 1 2 3 Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

ZB-OM00301

) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.5 N.C. / ZB05-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.6 N.C. / ZB06-K1/J1 (0.5MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [MPa] [L/min(ANR)] 38 - No.ZB-OM00301 0.3 / ZB03-Q1/Q2 (0.5MPa ) [L/

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

HRX-OM-X037

or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/

SYJ300-OMU0003

DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

"n" pcs. Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

IDX-OM-U022

4 P 5 X4 PRR COM1 () X0 6 THR X1 THS2 THS1 CM L X2 OLR N PRS2 PRS3 MC1,2 X3 EDV PE P P THR THS1,2 24V TB1,2 T V V FM1,2 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 6 6.4 IDX-OM-U022 6.

MHL2

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

Compact Cylinder with Solenoid Valve/

) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8

HRX-OM-X071

Connect the stripped cable to the L, N, PE terminals(For 400V, L1, L2, L3, PE) of the female connector. (Recommended tightening torque: 0.7 Nm) Female connector Screw (Recommended thightening torque : 0.7Nm) PE 2(N) 1(L1) 1(L) 2(L2) PE 3(L3) 200V type 400V type Fig 3-5 Cable connection HRR Series 3.3 Installation 3-11 HRX-OM-X071 Chapter 3 Transport and Setting Up 5.