51

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) Note 1) BMA3-020 Note 1) BMA3-025 Note 1) BMA3-032 Note 1) BMA3-040 Note 1) BMA3-050 Note 1) BMA3-063 CJ1 Note 2) BMA3-020S Note 2) BMA3-025S Note 2) BMA3-032S Note 2) BMA3-040S Note 2) BMA3-050S Note 2) BMA3-063S D-M9A(V) CJP D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF D-H7BA D-B5/B64 D-B59W D-G5/K59 D-G5W/

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-4.3 (For mounting) 37.5 4 Manual override A B 24 A B P R 42.1 16.9 With interface regulator 39 [41.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 108.1 [110.3] (Light/surge voltage suppressor) 69.6 [76.6] 50.1 [57.1] + 54.2 45 34.7 31.5 21.5 6 6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions 15 D HL XA FH 4-SS thread depth S (Helical insert depth) Attached from bottom with CAP bolt Bolt size: MD Attached from top with bolt L 4-recessed area diameter BB 4-recessed area depth CC LA A X A FG 4-BA LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D Floating block FE Note 1) Section D-D 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached

VQ5000

(for F, L, S & T1 kits) D side end plate assembly 1. D side end plate assembly part no.

Transfer

model Bore size (mm) CEP1 25 8.5 32 11.5 40 11.5 D-Z7/Z80 CE1 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 9 10 CE2 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

MXS Series Air Slide Table

45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 72 72 Air Slide Table MXS Series Appropriate mounting position for stroke end detection (mm) Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

(mm) Auto switch model Bore size (mm) Bore size (mm) Auto switch model MGJ 40, 63, 100 40 63 100 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL MGP BMG2-012 6 6.5 6 MGQ D-Z7/Z80 10 10 10 D-M9(V)/M9W(V)/M9A(V)L D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MGG 6 6 6 MGC BMG2-012 Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Actuator/Vane Style Series CRB1

Reed switch Connector, 2-wire D-R80 CDRB2BW20/30/40 CDRBU2W20/30/40 D-S79 Grommet, 3-wire (NPN) Solid state switch CRB1BW50/63/80/100 D-S7P Grommet, 3-wire (PNP) Grommet, 2-wire; Connector, 2-wire D-T79 Solid state switch with 3-wire type has no connector type.

VZ5000

VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220-

JXCx-OMT0023

H T E (Note)L d W D T Max.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MDHR2-20, 30 MDHR2-10, 15 H H L L Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Auto switches of D-M9N, D-M9P and D-M9B are used. Auto switches of D-M9NV, D-M9PV and D-M9BV are used. Max. Protrusion of Auto Switch from Edge of Body: L, H Max.

Rotary Actuator

Angle adjusting screw Angle adjusting screw Angle adjusting screw n o A R ti n 0 0 n c ot g 9 e 9 o l e y at ir ti y c d a a a io e d w g w ir n j n u y d y ti s ra e e g s ti k k u n n n g j ti of d g of s d a e u ir e e e e j d of c l g a g ti g o n n e n k A n l g n ra ra A e y n n w io io a y at at 9 ot ot 0 R R The rotation range under the adjustment of an angle at 60 is indicated

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

blank plate assembly SYJ5000-21-1A Applicable individual exhaust spacer assembly SYJ5000-17-1A Stations P port Rc(PT) 2 stations 02 1 8 : : 20 stations 20 R port Rc(PT) 1 8 40 Type (5 Port/Base mounted) Applicable solenoid valve SYJ5l40-l SYJ5l43-l SYJ5l50-l SYJ5l53-l Applicable blank plate assembly SYJ5000-21-1A How to Order SS5YJ5-40-05 -M5 P port Rc(PT) 1 8 Stations 02 2 stations : :

Cylinder with Lock Series MNB

D-F5LF (2 color indicator) D-A53 D-A54 D-A56 D-A64 D-A67 D-A59W (2 color indicator) Single rod Series MNB 40 50 63 80 100 25 to 500 Cylinder with Lock Series MNB Tie-rod mounting type 25 to 600 Double acting Double rod Series MNBW 25 to 700 Feature 2 Cylinder with Lock Double Acting: Single Rod Series MNB 32, 40, 50, 63, 80, 100 How to Order MNB L 50 100 D Standard type With auto switch

13

Effective area of tubing Effective area of tubing from graph below Tubing O.D. 9 V x 60 Q Adsorption response time T1 = Adsorption response time T2 = 3 x T1 Piping capacity 3.14 4 1 1000 V = D 2 x L x ( l ) T1 : Arrival time to 63% of last vacuum pressure Pv T2 : Arrival time to 95% of last vacuum pressure Pv Q1: Average adsorption flow l/min (ANR) D : Piping diameter (mm) L : Length from

REC

58.0 35.5 55.0 32.5 56.5 33.5 53.0 30.0 CC 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.0 36.5 63.5 33.0 RB Auto switch model Bore size (mm) Operating Range Auto Switch Mounting Height D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B5 D-B64 D-B59W D-G5NTL D-H7C J 20 25 32 40 D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C7/C80 D-C73C/C80C D-C73C D-C80C D-A44 8 10 9 10 D8 10 9 10 D-B5/B64 13 13 14 14

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Direct Operated

Dimensions: Manifold / Base Material: Aluminum Normally closed (N.C.) : Normally open (N.O.) : VVX31/VVX32/VVX33 Common (COM.) : W N F 33 25 2 x E Mounting hole Port indication 2 x Rc1/4 Y 44 T Q G1/2 3 1 A A C D B B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240

CL

L Dd9 d Applicable bore size (mm) Part no.