SL5200 0.14 30 0.21 15 0.10 20 0.14 10 0.07 10 0.07 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 4 8 12 16 20 24 28 32 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.
SYJ7000-21-1A 1 pc. 5(R) 1 (P) (R)3 5(R) 1 (P) (R)3 3 position pressure center 4(A) (B)2 The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 5(R) 1 (P) (R)3 Caution Be sure to read this before handling the products.
double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position closed center (B) 2 (A) 4 (B) 2 (A) 4 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust
Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female
IDFA Case material Material Aluminum Stainless steel IDFB Symbol 1 2 Flow Rate Characteristics IDH The flow rate characteristics are the same as the SFD100-02. Refer to Flow Rate Characteristics on page 322. ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.
) 3 (R) 5 (R) 1 (P) 3 (R) Note 1) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.
40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: C (N.C.
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: B (With Bracket), Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: Without Pressure Gauge, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow
Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, D: D
Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.
to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, D: D
R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
Body Size: 20, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: Without Auto Drain, Pressure Gauge/Switch Option: Without Pressure Gauge, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction
Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: R (External Pilot), Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: D (DIN Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: 02 (Body Ported 1/4), Thread: T (NPTF)