Fieldbus System

type) H Nil R Internal pilot External pilot R U S Z NS NZ For K and H, mounting screws do not fall out from the valve.

Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

CS1

105 M30 X 1.5 30 39 69.5 4 CM2 86.5 5 4 X 40 40 32 28 8 60 55 110 M36 X 1.5 34 39 76.5 4 94.5 5 4 X 40 50 40 32 8 67 70 125 M40 X 1.5 44 42.5 84.5 4 C85 180/200 250 300 5 4 X 55 115 50 40 8 67 70 125 M45 X 1.5 44 40 42.5 105 4 6 5 X 65 144 9 86 160 66 63 75.5 M56 X 2 53 50 132 50 5 CG1 6 5 X 80 178 9 175 71 84.5 M64 X 2 66 105 166 80 63 63 5 Y type double knuckle joint Rod end nut MB C95

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

PF-OMN0009_C

N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -13No.PF-OMN0009CN-F FLOW POWER (OUT ) M8 1 DC+ (4 ) () 2 NC/ () () 3 DC() 4 (IN ) () M8 IN OUT POWER FLOW POWER FLOW -14No.PF-OMN0009CN-F

Air Cylinder CP Series Cylinder Positioner Assembly

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

Title not found

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

VZS

Note) K plug connector DIN terminal 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC FS Plug-in With surge voltage suppressor D DIN terminal/With light /surge voltage suppressor KZ K plug connector With light/surge voltage suppressor DZ 6 12 VDC 9 Other KS K plug connector With light/surge voltage suppressor Note) Since F and K types are attached without lamp cover, it should be arranged

Compact Cylinder

Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8

VQ5000

Hirose Electric Company 2-M2.6 x 0.45 55 Socket side 1425 113 Terminal Nos. 47.04 How to Order Manifolds F 03 U K VV5Q 5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type

42

40 0.6 Outlet pressure [MPa] B EB 37 19 37 0.5 Note 1) Set the pressure within the operating pressure range of the valve.

Shock Absorbers and Rate Controls

50.0 0.3,4.3 2,300 t2,000 6i,000 0 200 t2,000 t.0 0ttl3,Ofix3.J 40 90.0 0.3"4.3 4,000 652,000 67,000 0 200 12,000 9.1 0Ill3.0ilx5 40 125.0 0.3.4.3 5,700 933,000 67,000 7l ?

MXW Series Long Stroke Slide Table

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

EXxx-OMN0035CN

UNC) 5 6 () EX600-DXF No. 1 LED 2 () 3 4 5 () -19No.EX-OMN0035CN-A (1)EX600-DXB/EX600-DXD 1 24 V() 2 2 3 0 V() 4 1 5 FE M12 (4 ) EX600-DXPB/EX600-DXPD EX600-DXNB/EX600-DXND 1 24 V 1 24 V 2 2 2 2 2.7 k 2.7 k DC24 V DC24 V 3 0 V 3 0 V 4 4 1 1 2.7 k 2.7 k 5 5 FE FE FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24

Proposals for Energy Saving

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

T

9 Tubing Series T Variations K Tubing O.D. Tubing O.D.

RQ

50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.