MGG

11 12 115 200 50 M10 For long strokes Bore size (mm) Stroke range (mm) Bore size (mm) O Q R S T U V W X XA Z PG PL Y R Y 20 250 to 400 M6 x 1 depth 9 94 12 26 16 114 65 52 30 3 194 20 30.5 74 152 14 160 25 350 to 500 105 12 31 20 138 84 62 37 3 228 M8 x 1.25 depth 13 25 35.5 82 162 14 170 32 350 to 600 106 12 38 20 138 84 62 37 3 228 M8 x 1.25 depth 13 32 35.5 82 165 14 173 40 350 to 800

Hygienic Design Cylinder Series HY

W 50mm W 860 Series HYQ Hygienic Design Cylinder Basic Type Construction: 20, 25 Basic type !1 u y o !4 e !2 !0 r !5 !3 t q i w Rod end male thread !6 !8 !7 Built-in magnet !9 @0 @1 CJ5 CG5 (Auto switch D-F6) Component Parts HY No. Description Material Qty. Note No. Description Material Qty.

T

Burst Pressure Characteristics Curve and Operating Pressure How to Order 5 TPS0604 B 20 4 Burst pressure (MPa) Tubing model Burst pressure 3 Color Length per roll Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20 m roll 100 m reel Symbol 20 100 Max. operating pressure 2 1 20 0 0 20 40 60 80 Operating temperature (C) 15-6-23 1 Miniature Tubing and Miniature Fittings Series

Fieldbus System

mA, 4 to 20 mA Input signal range 16 bit resolution 10 to 10 V, 5 to 5 V 20 to 20 mA EX600-AXA Max. rated input signal 15 V 22 mA Note 2) Input impedance 100 kW 50 W Linearity (25C) 0.05% F.S.

MTS

W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.1 0.01 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3) Graph (6) Maximum Speed: Up to 500 (mm/s) Maximum Speed: Up to 600 (mm/s) 0.3 20 30 40 50 0.2 10 0.1 Weight W (kg) Weight W (kg) 2 3 4 5 40 32 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 8 20 0.02 16 12 0.01 5 10 20 30 0.1 5 10 20 30 50 100

Air Cylinder

30o MM W W AL T T A A A MM L H H H 25 Series CA2 Simple Specials These changes are dealt with Simple Specials System.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

Vacuum Module Series ZX

VDC are applicable to 0.45 W.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

LEC-OM02904

DC24V 2. 20 3. 4. 5. 6. 7. 8.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

to 20 stroke Graph (12) Stroke: Up to 20 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

Compact Manifold Regulator Series ARM5

VY2 17 VBA VBAT AP100 513 Series ARM11A/B Pressure Switch Block 56 ARM11AW Z A 0.6 0.2 0.4 MPa 20 24 56 q w 0.5 0.1 0.3 1. Accessory 2.

Step Motor Driver （ Pulse input type ）

XX W-AREA1 Stroke(-)to Stroke (+) of the basic parameter If W-AREA1 >W-AREA2, the alarm Parameter ALM will be activated.(However,no alarm is generated if W-AREA1= WAREA2= 0, the WAREA output will be turned OFF) XX W-AREA2 ORG Correct [Link Offset] Fixed value This is the fixed value for this driver.

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Air Slide Table Series MXQ

It requires to order separately. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Air Slide Table Series MXS

(kg) Fig. (2) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 MXH W Mp Mr W MXU W My L3 A6 W L1 A2 L2 A4 MXS W Mey Mep MXQ Note) There is no need to consider this load factor in the case of using perpendicularly in a vertical position.

CE

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

CE

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.