Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

L n Dimensions 9 288 477 8 263 452 L1 L2 10 313 502 7 238 427 11 338 527 6 213 402 12 363 552 5 188 377 13 388 577 4 163 352 14 413 602 3 138 327 15 438 627 2 113 302 16 463 652 2-5-29 Series VQ4000 Construction Plug-in Unit e q w e q w Metal seal type Rubber seal type (A) 4 (B) 2 42 (A)(B) VQ4101 VQ4100 1 (P) 5 (R1) (R2) 3 1 (P) 5 (R1) (R2) 3 e q w e q w (B) (A) 42 4 (B) 2 (A) VQ4200 VQ4201

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

7

VXB VXE (VXD23 Resin body) (VXD24) VXP Comparison with SMC current model Power consumption Current model VXR VXD 7 mm 7 mm Air Air (DC/N.C. valve) Body material VXH 4.5 W (VXD23 to 25) 10.5 W (VXD28, 29) 7 W (VXD26, 27) Resin (VXD2 3 A) Aluminum (VXD2 3 A) VXF VX3 VXA (Current model) Bracket standard equipment 96.5 mm 96.5 mm (New VXD) Applicable tubing O.D. 10, 12/mm 3/8"/inch 103.5 mm

Pin Cylinders Series CJP2/CJP

Applicable tubing 4 5, 10, 15 2.80 1.00 CJ-5H-4 For 4/2.5 tubing 6 5, 10, 15 3.92 1.42 MB1 CJ-5H-6 For 6/4 tubing 10 5, 10, 15 5.98 2.45 15 5, 10, 15 10.80 4.41 CA2 Same spring force for each stroke. CS1 Construction (Not able to disassemble.) CS2 Panel mount type Embedded type i e u q r w t y Component Parts No.

48

How to Order LEL 25 100 M T 1 1 6N q w e r t y !

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

A_HEC-OM-K001

flow rate: 5L/min, Ambient temp.: 25oC 1) Cooling capacity 1200 1000 Facility water 25oC Cooling capacity W Facility water 10oC 800 Facility water 35oC 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-9 Cooling capacity (HED005) 2) Heating capacity 1400 1200 Heating capacity W 1000 Facility water 35oC 800 Facility water 10oC 600 Facility water 25oC 400 200 0 0 10 20

High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

Series AK1000

Porting Configuration V3 1 2 10 40 -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa t w w q q 1) Other range available.

MXS Series Air Slide Table

Examine for My My=10(10+30)/1000=0.4 A3=30 Examine for My My=10(30+10)/1000=0.4 A6=10 M=W(Ln+An)/1000 Corrected value for center position distance of moment An: Table 3 Calculate allowable static moment Ma(Nm) Ma=K Mmax Work mounting coeficient K: Fig.3 Allowable moment coeficient : Graph 2 Max. allowable moment Mmax: Table 4 2=M/Ma May=1 x 1 x 15.9=15.9 Mymax=15.9 K=1 =1 2=0.4/15.9=0.0252

CJ2

Bore TH TT TU TC M3 X 0.5 6 6 8 11 CJ-CF006 8 CJ-CR006 5 6 +0.048 0 +0.048 0 CJ-T010B 10 M4 X 0.7 10 8 10 13 CJ-CF010 10 CJ-CR010 6 8 8 12 32 22 18 40 29 2 9 4.5 3.3 3.1 CJ-T016B 16 M5 X 0.8 16 10 12 15 CJ-CF016 12 CJ-CR016 7 10 10 16 38 28 20 48 35 14 2.3 5.5 5 6.4 Accessory: SCJ2 Bore size #11 1.3-12 Standard: Double Acting Double Rod Series CJ2W 6, 10, 16 How to Order CJ1 Bore size 6mm

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

HRX-OM-I051

Item Setting range HRZL : -20.0 to 40.0C HRZ-L2 : 10.0 to 40.0C HRZ-H : 20.0 to 90.0C HRZ-W : -20.0 to 90.0C 1 TEMP SP 2 FLOW SP 10 to 40LPM(2.6 to 10.6GPM) FLOW SP is only indicated on HRZ010-W*S and Setting is available.

CLA

'I. 78 11 48 11 7 11 58 131 100 J -750 20-750 37 40 116 140 'I. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28

Uniaxial Electric Actuator Series LJ1

0 0 2 4 6 8 10 0 1 2 3 4 5 Work load (W) kg Work load (W) kg Work load (W) kg 300 30 150 L2 200 20 M2 100 L2 mm L2 mm L2 mm W 100 10 50 L2 M2 0 10 30 20 0 1 2 3 4 5 0 2 4 6 8 10 Work load (W) kg Work load (W)kg Work load (W) kg 30 300 150 a=500 a=500 a=500 Horizontal/Lateral a=1000 a=1000 a=1000 20 200 100 a=2000 a=2000 L3 mm L3 mm L3 mm a=2000 L3 100 10 50 W M3 a 0 1 2 3 4 5 0 10 30 20

0.55

stations stations Manifold base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).

ChemicalThermo-con

Heat Exchanger Specifications HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 Heat exchanger model Cooling capacity (Water) Note 1) 500 W 300 W 750 W Heating capacity (Water) Note 1) 1000 W 600 W 1800 W Cooling/Heating method Peltier device (Thermoelectric device, Thermo-module) Radiating method Water-cooled Operating temperature range 50 to 140F (10 to 60C) (depending

XM, XY

2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

VCC

0 1 A-PET VCC12(D)-00 VCC13-00 (common) TQ A-u B-w G-w H-w A-!0 O-ring assembly 1 set unit VCC12-OR-5 1 O-ring Special FKM Switching display cover Switching display cover 1 set unit VCC10-30A-1 10 A-PET Note) If the manifold is disassembled or rearranged, replace the O-rings with new O-rings.