Micro Mechanical Valve Series VM1000

Combination possible: Combination impossible: Construction Side ported Bottom ported R port 3 port only R port 3 port only w t e u Non-actuated Non-actuated w t e u q q i Port 1 Port 2 y r y Port 2 Port 1 r Actuated Actuated Force Force Port 1 Port 2 Port 2 Port 1 Component Parts No. Description Material Note 1 Valve ZDC White coated No.

180° Angular Style Air Gripper Series MHY2/MHW2

MHR Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease Grease for food MHK -X4 -X5 -X50 -X53 -X63 -X79 MHS MHC MHT MHY MHW -X MRHQ MA D663 Series MHY2 Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !

Smooth Cylinder

300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Rotary Actuator/Vane Style Series CRB1

b (h9) h (h9) Model l W CDRB1BW 5020 0 40.030 0 40.030 P PORT CDRB1BW 6325 50.030 0 0 50.030 CDRB1BW 8036 50.030 0 0 50.030 4 x T CDRB1BW10040 0 0 70.036 70.036 S F CDRB1BW-SE, CDRB1BW-DE L E K Key length B port B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

CXWM/CXWL

e r t y u i o !

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

CV/MVGQ

55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ S LS ZZ ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177 137 181 152 112 156 127 87 RB 25 8 20 M26 x 1.5 210 177 137 185 152 112 160 127 87 25 8 20 M26 x 1.5

Clean Regulator/Fluororesin Type

4 u !3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

-fl Seies

Series NVFR3OO0:Base Mounted Tlpe Manifold Base,/ Construction Plug-in Type,/ Non plug-in Type o '{2,. a t U// @ Note: NVFR/NVFS Series manilolds are oonstructed using the same parts, N-N W^N Subplate Base Parts List No. Description Maleial Part No.

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

Ejector Valve Unit Series ZYY/ZYX

-40 -40 20 -40 Suction flow rate Suction flow rate -20 10 -20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics -100

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

CM2

e r t y u i o !

MK

19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style Auto switch Symbol Through

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) AMJ N NBR 10 to 16 20 to 50 S Silicon rubber 10 10 mm Misc. U Urethane rubber 20 20 mm F Fluoro rubber 30 GN 30 mm Conductive NBR 40 GS 40 mm Conductive silicon rubber 50 50 mm 20 and larger are manufactured upon a receipt of order. Buffer type J K Rotating Non-rotating Buffer Spring Reactive Force Stroke end Pad dia.

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 B *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V