Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com. (For F, L, S, T kit) VVQ4000 3A 1 VVQ4000 2A 1 Electrical entry Electrical entry L F C L F C F , L, T, S kit F kit (Connector side) C kit (Plug lead type) F , L, T, S kit F kit (Connector side) C kit (Plug lead type) (1) (1) Option Option VQC Nil W CD SD Standard IP65 enclosure For exhaust cleaner mounting Direct exhaust with silencer box Nil W CU SU Standard IP65 enclosure For exhaust cleaner
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Note 2) For ZSE40 (F)/ISE40--22 62 Note 3) For ZSE40 (F)/ISE40--30 70 Note 4) For ZSE40F (compound pressure) with psi indication, this is 0.03 to 0.04 psi. Note 5) For ZSE40F (compound pressure) with psi indication, zero clear is in the range of 0.01 psi.
F F 7 1 5 The model selected in Step or can be used. The model selected in Step or can be used. 1 5 Selection result Selection result: IDH4 Selection result: IDH6 Select the built-in products. (Refer to page 3.) Select the option. (Refer to page 3.) Select the built-in products. (Refer to page 3.) Select the option.
.S. or less (with rated pressure range), 5% F .S. or less (with extension analog output range) 1% F .S. or less Linearity 1% F.S. or less Repeatability 1% F.S. or less based on the analog output at 18 V ranging from 12 to 24 VDC Power supply voltage effect Enclosure IP40 Environmental resistance Operating: 0 to 50C; Stored: 10 to 70C (No freezing or condensation) Temperature range Withstand
F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37
Nil V Standard For vacuum X505 Series VPA500 Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF Series VPA700 Specifications Fluid Air Type of actuation N.C. or N.O.
---t~-+.,,-,H 06~L 0.5 ,~__:8Not suitable for a compressor with capacity less than 0.7Skw. (100 f! Imin (ANR)) ~ ," --f '" ~OA ~ OOperating pressure is 0.1 MPa{1.0kgf!cm2} or more. (Float type normally close) ~ 0. 3 ,,-O Can be used with a compressor with capacity lower than 0.7Skw Q. ~--~--~~. Qi . .3 0.2k .
*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.
C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C). Function : Sets upper limit of temp. which the internal temp. sensor detects and judges the unit should be shut off. When the temp. set in this item is reached, the alarm [ERR12] arises. L o w T e m p . C u t o f f 9. Low Temp.
R 1 GL WB T BG VD 4xRT I 9 H1 Q V VB 4xRT BG GF G I12 F GE BN 1 + Stroke 8 ZZ + Stroke AM WH H VA Be 11 46 52 65 75 95 114 Bore size (mm) B AM BP BN D EE GE BG GL 1 H 2 E1 GF H F GL E G GA GC GD 1 18.3 19.5 22.4 20.7 26 26 6 8 11 11 13 16 48 54 69 69 86 91 97 104 120.5 134.5 169 189 12 16 20 20 25 30 16 16 16 16 16 16 88.5 96.5 111.2 123.5 157 177 45.5 52.5 58.5 68 81 96 13 13 14 14 20 20
Nil N T F Rc NPT NPTF G Combination of manifold options shown below and external pilot specification is not possible.
(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions
A A B C D E F G H B C D E F Pressure port Pressure port Right Left Left Right Right Left Left Right Right Left Left Right Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.
A port B port P A B Pressure gauge adapter Short Long X1S X1L Pressure gauge indication unit: Bar/Psi Blanking plate: VVS8040-11A 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-2 Series VSR/S8-4, 8-2 Dimensions VV801 F-MDO 4 Series VSR/S8-4, 8-2 Dimensions VV801 F-SDGN 5
Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20
F The short circuit of the power supply for the input/output device has been detected. RWr(n+3) Unit No.0 RWr(n+6) Unit No.1 0 There is an error in channel 0. : : : RWr(n+1B) Unit No.8 RWr(n+1E) Unit No.9 F There is an error in channel 15.
After washing the element, make sure the base seal is properly mounted. 4 Vertical Suction Filter Series FHIA Dimensions Differential pressure indicator 16 lB (34) F OUTLET Removal dimension K H F OUTLET D E C H Differential pressure indication switch 62 (65) F INLET 4 x I OUTLET A J lG (mm) A B C D E F G H I J K Model Weight (kg) FHIAl-04 FHIAl-06 FHIAl-08 FHIAl-10 FHIAl-12 FHIAl-16 FHIAl
B roken pi eces i nj uri ng i f broken. Ref er draw i ngs or cat al ogue f or const ruct i on and speci f i cat i ons. U nderst and t hi s operat i on m anual w i l l be revi sed w i t hout not i f i cat i on. ** O p ti o n H : 1.6 M P a ( O nl y 2C22C To get t he best perf orm ance f rom your purchase, be sure t o read t hi s m anual caref ul l y bef ore use.
How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard