BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

PS-OMH0005CN

48 ZS-26-D PSE100PSE200 -8No.PS-OMH0005CN-D () LED () () () (UP) (SET) ) (DOWN) ()OUT1(CH1CH4)OUT2(CH1)ON LCD() (UP)ON/OFF (DOWN)ON/OFF (SET) () SI(MPakPa) kgf/cm 2barpsiinHgmmHg ()CH1CH4 -9No.PS-OMH0005CN-D 7 7 "8"7 "-"()7 D digit() 1digit=1kPa 1,2,3,,99,100 1kPa F F.S.

Precision Regulator

How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

PSxx-OMH0002CN

"-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00 F 01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

AR Series Modular Type Regulator

v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Swivels

A B Hex 1 Hex 2 Port 1 Port 2 A D Swivels PS410303-4-4 3.11 2.08 .75 1.19 7/16-20 7/16-20 78.9 mm 53.0 mm 19.0 mm 30.2 mm UNF-2A UNF-2A B Hex 2 Hex 1 PS610303-6-6 3.23 2.18 .88 1.31 9/16-18 9/16-18 82.0 mm 55.2 mm 22.2 mm 33.3 mm UNF-2A UNF-2A Port 2 Port 1 PS810303-8-8 3.56 2.38 1.12 1.50 3/4-16 3/4-16 90.3 mm 60.3 mm 28.6 mm 36.5 mm UNF-2A UNF-2A PS810303-10-10 3.76 2.48 1.12 1.50 7/8-

1

Note 7 NCA Non-rotating rod type Lateral load resisting type r, !1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !

A-HEC-OM-J004

Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment. 7-7 7.4 Communication . 7-8 7.4.1 Specifications . 7-8 7.4.2

5

01 03 50 12 Part no.

HRX-OM-X010

System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ Series TOC-3 HRX-OM-X010 Table of Contents 7.3.2 Draining of facility water. 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification

HRX-OM-I051

from DIO REMOTE to LOCAL. . 5-13 5.4.3 Example 3: Alarm signal of contact signal is changed from N/A to ALARM1. . 5-14 Chapter 6 Error Message and Troubleshooting . 6-1 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage

HRX-OM-K003

System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2

SMC Wireless System PROFINET compatible

Power Supply Cable with 7/8 Inch Connector/Power Supply Connector Straight connector type Angle connector type Socket connector pin arrangement 7/8 inch (Mini style) -126No.EX-OMW0006-D Field wireable connector Plug connector Socket connector pin arrangement pin arrangement 7/8 inch 7/8 inch (Mini style) (Mini style) Applicable Cable Terminal No.

Pressure Relief 3 Port Valve With Locking Holes

SPECIFICATIONS 6~7 4. HOW TO ORDER 7~8 5. CONSTRUCTION / PARTS LIST 9~10 6. OPTIONAL ASSEMBLY 11 7. DIMENSIONS 12~13 Pressure Relief 3 Port Valve With Locking Holes Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Fieldbus system PROFIBUS DP compatible SI unit

Content 0 to 4 A unit number of 0 to 9 is displayed. 5 Reserved 6 (This bit is fixed to 0) 7 (This bit is fixed to 1) Channel number Bit No. Content 0 to 5 A channel number of 0 to 63 is displayed. 6 Input/Output Type: 00 = Reserved, 01 = Input, 10 = Output 7 -68No.EX-OMN0028-B Diagnostic type Bit No.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

SMC Wireless System EtherNet/IP ® compatible

Power Supply Cable with 7/8 Inch Connector/Power Supply Connector Straight connector type Angle connector type Socket connector pin arrangement 7/8 inch (Mini style) -115No.EX-OMU0028-D Field wireable connector Plug connector Socket connector pin arrangement pin arrangement 7/8 inch 7/8 inch (Mini style) (Mini style) Applicable Cable Terminal No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Refer to pages 4 through to 7 for the JIS symbol.

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000