-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

-11-R1-100-MW 3/8" Polyurethane Tubing 100 ft. - Red TIUB-01-W-50-MW 1/8" Polyurethane Tubing 50 ft. - White TIUB-01-W-100-MW 1/8" Polyurethane Tubing 100 ft. - White TIUB-03-W-50-MW 5/32" Polyurethane Tubing 50 ft. - White TIUB-03-W-100-MW 5/32" Polyurethane Tubing 100 ft. - White TIUB-07-W-50-MW 1/4"

VFA3000

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA

IZx-OMV0005

Ionizer Body Installation . 14 3-2. Wiring . 17 3-2-1. Connection Circuit . 17 3-2-2. Wiring of the power supply cable . 19 3-2-3. Ground connection . 19 3-2-4. AC adapter . 19 3-3. Timing chart . 20 4. Function . 21 4-1. Name of Parts . 21 4-2. Emitter maintenance alarm and cleaning . 21 4-3. Replacement of the emitter assembly . 22 4-4. Alarm function . 24 5.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

16 " " Y G C Note) 0604 0805 0806 1065 1075 A07 A11 A13 B05 B07 B11 B13 1 4 " 3 8 " 1 2 " 3 16 " 1 4 " 3 8 " 1 2 Inch size Note) Polyurethane only.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

5 Port Solenoid Valve Series SV

SV1000 3 position 73 (.16) (B) 2 (A) 4 4 position dual 3 port 71 (.15) SOL.b SOL.a Single solenoid 74 (.163) 3 (EB) 5 (EA) Double solenoid 78 (.17) SV2000 1 (P) 3 position 83 (.18) 4 position dual 3 port 78 (.17) 4 position dual 3 port valve: N.C./N.O.

Ozone Resistant

-00 80-VM230-02-00 80-VM430-01-00 80-VZM450-01-00 80-VZM550-01-00 80-VFM350-02-00 80-VHS400 80-VHS500 80-VHS2500 80-VHS3500 80-VHS4500 80-VHS2000 80-VHS3000 80-VHS4000 80-VEX12080-VEX13080-VEX15080-VEX170VEX1A33B VEX1B33B 80-VEX123380-VEX153380-VEX173380-VEX350 80-AR435 to 935 4, 5-port solenoid valve 3-port solenoid valve Directional control valves Mechanical valve 3-port residual pressure

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN

ASP

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

PSE540/560

B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With across flats 12 M5 x 0.8 7 M5 x 0.8 16-3-26 5 Pressure Sensor For General Fluids Series PSE560 How to Order ZSE ISE Pressure sensing range PSE 0 1 3 4 Positive pressure (0 to 1 MPa) Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa) Positive pressure

PFxx-OMJ0005CN

1. 2. 3. 4

Direct Operated Solenoid Valve Metal Seal Series VS4
10

0.98 1.22 VS4310-02 (8A) 1 4 3.8 3.6 0.23 0.33 0.89 0.89 3 (3 position) VFS VS4310-03 (10A) 3 8 4.2 3.8 0.23 0.32 1.00 0.99 (Closed center) VS4410-01 (6A) 1 8 3.1 3.0 0.28 0.28 0.77 0.75 VS4 360 180 15 or less 45 or less 0.98 1.22 VS4410-02 (8A) 1 4 3.9 3.5 0.22 0.27 0.94 0.84 VS4410-03 (10A) 3 8 4.0 3.7 0.26 0.32 1.00 0.94 (Exhaust center) VQ7 Note 1) Min. operating frequency is once every

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

3 !4 !

Table of Contents

SOL.b SOL.a 3(EB) 5(EA) 1(P) Conventional tie-rod base type manifolds are also available. 34 pins connector allows up to 16 stations with double solenoids. 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specifications is not available for 4 position dual 3 port valves. 3(EB) port 5(EA) port 4(A) port B side coil 2(B) port 1(P) port 1-2-2 1-2-3 3 Series

C95Series

RnDoneaUme 1.2 mS 1.2 mS 1.2mS 1.2mS Solid State Switch Type Auto swttch model I).F59 D-F5P D-J68 D-J51 1 Wire type 3 Wire 3 Wire 2 Wire 2 Wire output NPN PNP ---Application Relay.