CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Table of Contents

Actuation Plug Plug (A) 4 (B) (2) Number of solenoids (A) (4) (B) 2 Single 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Plug Plug (A) (4) (B) 2 (A) 4 (B) (2) Manual Override Operation Double Warning 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) Light/Surge Voltage Suppressor Handle carefully, as connected equipment can be actuated through manual override operation.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Stations L1 L2 L3 L4 2 123 112.5 91.5 15.5 3 4 5 6 7 8 9 10 148 137.5 123 12.5 173 162.5 144 14.5 198 187.5 165 16.5 135.5 125 102 16.5 160.5 150 133.5 13.5 185.5 175 154.5 15.5 210.5 200 175.5 17.5 148 137.5 112.5 17.5 Stations SS5X3-45GDBC4 C6 Stations L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 160.5 150 129 15.5 185.5 175 150 17.5 185.5 175 160.5 12.5 210.5 200 181.5 14.5 148 137.5

MHS

P O O S O P P C / ; ; ; ; C 18 4-3 3 MHS2 MHS3 MHS4 1 C C 4 2 5 mm Nm 16 M30.5 2.5 0.6 20 M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8

Process Gas Diaphragm Valve

Welded type, ports (2, 3, 4 ports) and porting configuration (flow direction 2, 3, 4) selectable How to order P.1110, 1112 Further information Optional porting configuration P.1114 Further information Example) Outlet Inlet Face seal fitting (Male) 1/4 Face seal fitting (Female) 3/8 Air operated type Fitting Status Body material Max. operating pressure (MPa) Cv 1) Connections Page Series

MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

MGP

P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

VH Series, 4 Way Hand Valve

3 (R) 74 1 (P) 62 62 49 2 (A) 45.5 46.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-1/4NPT 13.5 4-1/4,3/8NPT VH32 -N02/N03 (Bottom porting) 2 (A) 44 3 (R) 1 (P) 4-1/4,3/8NPT 4 (B) 5 Series VH Body Mount/Dimensions (mm) / Body mount type Dimensions VH40 -N02/N03/N04 VH40 -N06 Scale: 35% 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) 1 (P) 3 (R) 102 88 102 89 46.6

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 The above older MDB1 Direct Body Mount 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) our new part # MHL, Direct Body Mount 10, 16, 20, 25, 32 & 40 Gripper Bore sizes -Y7PSDPC MHQG2 Direct Body Mount 32 & 40 Gripper Bore sizes MHS2/3/4 Direct Body Mount 32, 40, 50, 63, 80, 100, 125

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210

EX510-GPR1.eng

Operation temp. range -10 to 50 oC Wiring Higher-level bus Protocol Bus Interface PROFIBUS DP V0 EIA RS-485 Internal circuit (Brown) +5V +24 V TD+ TD0 V INPUT OUTPUT Freeze function Available VP RD/TD-N DGND RD/TD-P SHIELD Synchronous function Available COM A Address setting range 0 to 125 Internal circuit +24 V RD+ RD0 V ID No. 140d HEX GND Device data file GSD file FG : This file is necessary

PFxx-OMJ0005CN

Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

FC Mounting hole B 0 0.3 A F NA FT NB FX FZ H S + Stroke F Z + Stroke Refer to page 8 for details of the mounting nut.

11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 72 Compact Cylinder/Large Bore Size: Double Acting, Single Rod Series CQ2 Replacement Procedure is 125, 140, 160 180, 200 P.290 Construction Standard Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !2 !3 !

Precision Cylinder Series MTS

MTS 8, 12, 16, 20, 25, 32, 40 Precision Cylinder How to Order Port direction Bore size Nil P Standard piping type Axial piping type 8 8mm MTS 8 A90L 20 8 MTS 20 A90L 100 12 to 40 Bore size Number of auto switches Nil S 2 pcs. 1 pc. 12 16 20 25 32 40 12mm 16mm 20mm 25mm 32mm 40mm Auto switch type Without auto switch Nil Refer to the table below for auto switch part numbers.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

(0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For

Environment

Load: F [N] LEY32 10 LEY25 LEY16 1 Based on the above calculation result, the LEY16B-200 is selected. Stroke [mm] 0 100 200 300 400 500 600 223 LEY Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Refer to page 225 for the LECPA and page 226 for the LECA6.

MXF

F A A Lr MXF8 Lr = 20 mm 0.04 0.04 0.08 MXF8-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXF8-30 0.03 0.06 0.03 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MXF8-20 MXF8-10 MXF8-20 MXF8-30 0.02 0.04 0.02 MXF8-

P-E99-4A Air Cylinder with Drop Prevention Mechanism — Cylinder with End Lock & Cylinder with Lock — Prevents dropping when air supply decreases or residual pressure is exhausted  Cylinder with End Lock Pick and place Locking door Drop prevention at stro

P-80 (JT)