SFOD-OMT0005CN

PWR:(P.25) MS: PLC STOP PLC RUN MS: 4.2 (P.19) MS: NS: IP IP 2 MSNS / PLC PLC NS: PLC PLC NS: NS: IP IP 15.(P.62) 3 ALM -79- USB PC USB USB USB LEC-W2 PC COM COM COM PC COM COM COM LEC-W2 4 (LEC W2) (JXC)= = =USB = (JXC) OFF (JXC) (PLC )( ) ONOFF PLC 5 9.1 (P.32) 3.(P.12) -80- 5(P.23) 9.1 (P.32) 3.4 (P.16) 10.(P.41) (CN1: EMG OFF 3.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Port 1(P) Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening torque size wrench XLAV-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 Body -63 M10 8 15 -80 Turn ON the solenoid valve to supply air pressure of 0.4MPa (G) to the port 1(P).

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

SYJA3000

) 2-M5 X 0.8 35 (Mounting holes for manifold) 17 (Pilot port) B A 1 34 B 27 A A B 13 1 1 1 3 R1 P R2 32.5 45.5 2-M5 X 0.8 31.5 38 (pilot port) 64 3.2 269.5 14 (Non-locking) Manual override (Mounting holes) 35 89 (Non-locking) Manual override 3-Rc(PT)1/8, 1/4 (P, A, Bport) 29 28 25 21 1.6 14 89 18 21.8 (Bleed hole) With filter (80 Mesh) 55 2-1.8 (Bleed hole) With filter (80 Mesh) 40 25.5 20

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

A2 A1 E1 L1 MM RR1 U1 NX CJ2 Material: Carbon steel d (Drill through) Applicable cotter pin l Applicable bore size (mm) Dd9 I-12 I-14 I-16 I-18 I-20 I-25 I-30 125 140 160 180 200 250 300 +0.084 0 0.1 0.3 L m 25 32 Part no. 8 54 46 100 M30 x 1.5 27 33 CM2 125 140 160 IY-12 IY-14 IY-16 IY-18 IY-25 IY-30 +0.084 0 0.1 0.3 0.065 0.117 28 36 25 8 54 48 105 M30 x 1.5 30 39 79.5 69.5 4 5 4 x 40 +

CEx-OML0058

No bellows With bellows S 1 pc. 40 25 to 850 25 to 700 50 25 to 800 25 to 650 n n pcs. 63 25 to 800 25 to 650 80 25 to 750 25 to 600 100 25 to 750 25 to 600 Bore size (mm) Available stroke (RFS) No bellows With bellows 40 To 1200 To 950 50 To 1150 To 900 63 To 1150 To 900 80 To 1100 To 900 100 To 1100 To 850 Applicable autoswitch types Refer to the autoswitch catalog for details. 11 2-2-2

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing M P D 45.4 49.4 49.6 52.4 56.7 61.3 64.5 67.5 69.7 72.7 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 7 8 9 10 15 17 23 25 29 30 KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

HRX-OM-X071

Refer to P.5-29,P.5-30 [Setting example of temperature range monitoring function]. Temperature range Monitor start time (setting range 0 to 9 sec) RUN SEC TEMP OUT START(Alternately displayed) Temperature range time outside monitoring range 25. Press the [] key. Displays time outside temperature range setting screen.

Rotary Table/

P-80 (D) 2nd printing April, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

VHK

(mm) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-25 25 Date issued: Photo copying this page is recommended.

Smooth Cylinder

0.03 0.02 Standard Stroke Table Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Guide Cylinder Series MGG

37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.