Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

Series 10-, 21- AF-A Air Filter

45 45 45 Drain guide port size 1/8 1/4 1/4 1/4 1/4 1/4 10-: Fluorine grease Grease 21-: Lithium soap based grease 10-: Class 3 Cleanliness class (ISO class) 21-: Class 3 Note 1) Inlet side pressure: 0.5 MPa, Pressure drop: 0.05 MPa (Representative value).

Series AP3500

Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish + Passivation Elgiloy PCTFE (Option: Vespel) PCTFE Dimensions inch (mm) AP3500 1.37 (34.8) AP3550 1.46 (37.1) AP3540/3580 AP3540 3.49 (88.6) AP3550 3.28 (83.3) AP3580 3.17 (80.5) 0.44 (11.2) A B B 45

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

VCHC Connection Female Thread: Rc, NPT, NPTF ASR ASQ Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 3.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

4 x M3 x 0.5 thread depth 6 M3 x 0.5 thread depth 4 35.5 (A, B common view) Vacuum suction port 0 12h9-0.043 +0.02 0 2 x 3 depth 6 (A, B common view) 1.5 Auto switch mounting groove 5 4.7 3.5 15.7 12 2-3 27 41.5 (45) 8 17 2 x 4.2 2 2 15.5 8-0.05 0 3.5-0.03 0 3.5-0.03 0 Open: 22, Closed: 14 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 935 Rotary Actuated Air

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

15

4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46 10 CY1S25-Z M6 x 1 M6 x 1 10 26.4 52 8.5 40.5 40.5 27.5 21.5 21 12.5 22 11 6.5 16 5.5 53 20 49 2 8 70 70 54 7 10 CY1S32-Z M8 x 1.25 M8 x 1.25 12.5 14 33.6 64 9.5 50

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

45 17 36 82.6 2 x 3/4, 1, 1 1/4 (IN, OUT port) 95 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

High Vacuum Angle Valve

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. I High-temperature type (H0, H4, H5) 1. For models with a heater, take care not to damage the insulation components of the lead wires and the connector section. 2.

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

CNS

0.2 stroke 133 36 184 Up to 1400 1401 to 1600 612 0.2 stroke 141 45 204 Up to 1400 1401 to 1600 Not available with auto switches. 9-8-13 14 Series CNS Dimensions Rod side flange style (F): CNSF M Rc BQ plug with breathing hole BC element T GB GA (In the case of NPT port) FA 4-J 4-FD Rc BP Unlocking port 2-Rc P Cylinder port Width across flats KA GL GR G G MM Q D EA E FY BF V FT VA AL A

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Fieldbus system EtherNet/IP compatible SI Unit

IO-Link master unit (EX600-LAB1): 44 byte occupied Output date: (Unit 3) IO-Link maser unit (EX600-LBB1): 44 byte occupied Output date: (Unit 4) SI unit (EX600-SEN7): 4 byte occupied When Diagnostic mode 0 Input data Output data Byte 0 DXB (Unit 0) Input 0 to 7 Byte 0 DYB (Unit 1) Output 0 to 7 Byte 1 Byte 1 LAB1 (Unit 2) Process data : : LAB1 (Unit 2) Process data Byte 44 Byte 44 Byte 45

PFxx-OMX0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

Digital Flow Switch (Manifold type)

-62No.PF-OMW0004-B Integrated display type (straight type): PF3WC (mm) Flow range (L/min) a 0.5 to 4 (symbol 04) 40 2 to 16 (symbol 20) 40 5 to 40 (symbol 40) 45 -63No.PF-OMW0004-B Remote sensor type (supply type): PF3WS (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33 14 40 2 to 16 (symbol 20) 33 14 33 14 40 5 to 40 (symbol 40) 33 14 33 14 45 -64No.PF-OMW0004

Digital Flow Switch (Integrated display type) ( compatible)

[oC]) PD = (Pr b) / a = [45 0] / 0.1 = 450 -76No.PF-OMV0006-B IO-Link parameter setting IODD file IODD (I/O Device Description) is a definition file which provides all properties and parameters required for establishing functions and communication of the device.

HRX-OM-W058

Weight*11 kg 45 *1 Use the product in conditions where freezing will not occur.

DOC1023125

Operation Instructions . 45 .. Outline of operation command . 45 .. Positioning operation . 45 .. Reset . 48 . Operation Examples . 49 .. Positioning operation . 49 Operation Mechanism. 50 . Positioning operation . 50 . Return to the origin . 51 . Response time in receiving an electric actuator input signal 52 1 - . Methods of interrupting operation . 52 Alarm detection . 53 .

DOC1023126

Operation Instructions . 45 .. Outline of operation command . 45 .. Positioning operation . 45 .. Pushing operation . 48 .. Reset . 51 . Operation Examples . 52 .. Positioning operation . 52 .. Pushing operation . 53 Operation Mechanism.54 1 - . Positioning operation . 54 . Pushing operation . 54 . Return to the origin . 56 .