Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Body (B) Body (B) Threaded portion Body (A) Through hole A port B port Body (A) Hexagon socket head set screw M5 (Hexagon socket head set screws are not availableif Body (B) has no machined threads.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

ZP

C D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U

CLQ

200 Warning 1.

Short Stroke Electric Actuator Series LX

(B contact) None Nil N.C. (B contact) Refer to the table on the right for proximity switch part numbers. N.O. (A contact) N.C.

Air Slide Table Series MXQ

Weight g 65 65 25 15 15 B side traveling parallelism to A side Refer to Graph 1.

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

Plug-in/Plug Lead: Single Unit

B 2 A 4 A B 4 A L2 P = 41 58.5 L1 B 2 A 4 A B 3 A B 2 A 4 A B 2 A P = 41 68.5 46 34.5 B 2 A 4 A 1 A X 12 Stations D side R4.5 15.5 17 22 51 69 117 Cable length (600 or 1500 mm) 123 194.5 (Single, Double, 3 position, Rubber type) 200 (3 position, Metal type) 2-Rc 1/8 (External pilot port) 2-6-32 Base Mounted Series VQ5000 Plug Lead Unit Bottom ported drawing VQC 59.2 46.8 106 83.5 SQ 55.5

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Air Cylinder NCQ7 Series Compact Cylinder

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Sine Rodless Cylinder Series REA

, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

Compact Manifold Regulator

0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Grommet Valve model C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 0.58 kg (For AC) 0.63 kg (For DC) VO325 4.1 0.24 1.0 4.4 0.18 1.0 4.5 0.15 1.0 4.3 0.23 1.0 VO325V (Vacuum spec. type) Precautions Changing from N.C. to N.O.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 4) Values for the low wattage (0.5 W) specifications. 2 position double (Double solenoid) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 3 position closed center 4 position dual 3 port valve (B) 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 4 2 5 3 1 1 (P) 5 (R1) 3 (R2) N.O.

Electric Slide Table / High Precision Type 《 AC servo motor 》

1.5 5 5 100 to 120 200 to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

Digital Gap Checker

(B) Within the acceptable range (Seats correctly).

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]