3 Way,3 Port Solenoid Valve NVZ Series

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

IDX-OM-U022

20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDFA100F150F 6 9 6.6 IDX-OM-U022 7. 7 7.1 / IDF100150F 7.1 7 1 A2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

(A) 2 Manual override 1 None 1 (P) B (1) Locking style (Slotted style) Note) Consult SMC if N.O. type is desired Note 1) Only normally closed DIN connector in-line style is applicable.

NVZseies

A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].;NPTF with 0.26 (1 Air and inert 20-100 PSI (15/cm'1 pressure vAc-1 l0Torr External pilot pressure 20-'100PSl(15 "7ks{/cm'?) Max. 120"F (50'C) 20ms or less (7OPS|) 600 cpm Nonlocking push type, (std-) Slotted locking type, Knob type (opt.)

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

LMU100/200 Series Mist Spray Unit

section AA L Dimension (mm) 20 200 25 250 30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable tubing Air adjusting needle for mist T0604 (6 x 4) Applicable tubing Oil adjusting needle Mixing valve (LMV20-) LMV201 L 46 (24) Double pipe nozzle AIR OIL D C B 12 E A 24 9.5 2 3 57(Max.) 12.5 AIR SMC 27.5 4 10 40 23.5 OIL L Dimension

Miniature Regulator

(OUT) Metric size None Bracket Nil B G ARJ310-01 4 mm 6 mm 04 06 Pressure gauge Note 2) For products with pressure gauge, pressure gauge is shipped together with product.

Miniature Regulator Series ARJ310

Miniature Regulator Series ARJ310 Improved flow characteristics 0.7 Conditions: Upstream pressure 0.7MPa 0.6 Downstream pressure MPa 0.5 ARJ310-01 0.4 0.3 0.2 ARJ210-M5 0.1 0.0 0 100 200 300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

CH series hydraulic cylinders are available in compact, round body, JIS or tie-rod types. Nominal pressure ranges from 3.5MPa to 16MPa. Bore sizes are available, depending on the series, from 20 to 160. Auto switches are available on most models.Projection area, weight, and overall length has been reduced when compared to the CH2 series, Applicable bore sizes: 32mm, 40mm, 50mm, 63mm, 80mm

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Body A U seal 1 12 PBT HNBR Elbow body Cassette 2 13 PBT Handle Seal 3 14 PBT NBR Body B O-ring 4 15 Stainless steel 303 NBR Body B O-ring 5 16 Stainless steel 303 NBR Needle O-ring 6 17 Stainless steel 303 NBR Seat ring O-ring 7 18 Stainless steel 303 NBR Needle guide O-ring 8 19 Stainless steel 303 NBR Lock nut Gasket 9 20 M5 type only Stainless steel 303 NBR, Steel Lock nut Spacer 10

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Description Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw Panel Front protective cover PF2D30 Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter B Mounting bracket