AWG

AWG30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Relief pressure Ambient and fluid temperature Nominal filtration rating Drain capacity (cm3) Bowl material Bowl guard Construction Weight (kg) Air 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa Set pressure + 0.05 MPa (at relief flow rate of 0.1 l/min (ANR)) 5 to 60C (With no freezing) 5 m 8 Polycarbonate 25 45

Mechanically Jointed Rodless Cylinder Series MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2C 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

ZP

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type. 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Stroke (mm) Model Pad form Flat/ Flat with ribs Deep Bellows ZPY2004 ZPY3507 ZPY4010 ZPY02 to 08 ZPY10 to 16 (Thin section series) 33 6 33 ZPY 10 to 16 10 45 45 46 10 ZPY 20 25 50 51 53 ZPY 32 40 50 ZPY ZPY 58 127 134 10 52

KR

Note) D1: Max. diameter 45 Male Elbow: KRK D A M Effective area (mm 2) Weight (g) H (width across flats) Applicable tubing O.D.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Specification Temperature rise (C) Note) Temperature rise (C) Note) Model Power consumption (W) 45 45 60 Model Power consumption (W) 45 45 60 VX21 VX22 VX23 VX21 VX22 VX23 4.5 7 10.5 4.5 7 10.5 AC Specification AC Specification Apparent power (VA) Holding 19 16 43 35 62 52 Apparent power (VA) Holding 22 18 46 38 64 54 Temperature rise (C) Note) Temperature rise (C) Note) Model Model Inrush

4/5 Port Air Operated Valve SYJA3000 Series

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF .

PC Wiring System

Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

90

56.8 67.5 62.5 73 45 60 71.8 82.5 75 85.5 60 75 86.8 97.5 87.5 98 75 90 101.8 112.5 112.5 123 90 105 116.8 127.5 125 135.5 105 120 131.8 142.5 137.5 148 120 135 146.8 157.5 150 160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Fieldbus System

Core wire color Yellow: TD+ 1 2 3 4 White: RD+ Orange: TD Blue: RD Connections Cable length PSRJ 020 EX9 AC EN Connector specification M12 plug (straight) RJ-45 connector PSRJ 010 1000 [mm] 020 2000 [mm] 030 3000 [mm] 050 5000 [mm] 100 10 [mm] 6.4 M12 RJ-45 47.3 44 L Core wire colors 1 2 3 4 5 6 7 8 2 1 Terminal no. Terminal no.

Electric Actuator

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 6) Only when motor option With lock is selected. Note 7) For an actuator with lock, add the power consumption for the lock.

Electric Rotary Table

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.) Note 5) The power consumption (including the controller) is for when the actuator is operating.

Compact Manifold Regulator Series ARM5

56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150) (169) (188) (207) L2 1.06 1.81

Modular Type Regulators Series AR

IN OUT How To Order B VHS 30 N 02 Z X513 EXH Residual Pressure Relief 3 Port Valve Dimensions mm With External Epoxy Coating, Stainless Fasteners B C D E F G H I Model A Body Size Symbol 20 30 40 VHS20 VHS30 VHS40 59 78 107 20 29 39 40 53 70 34 46 63 22 45 55 58 33 42 44 28 30 36 45 55 63 Applicable Model AC21 AC31 AC41 Name Plate In Imperial Units (PSI, F) Caution Thread Type N NPT If

Smooth Cylinder

, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

NCM

With Bumper LB 3.02 4.10 ZB 4.10 4.38 4.76 Bore size (inch) 075 (3/4") 106 (1-1/16") 150 (1-1/2") 45 Series NCM Accessories A F F Foot bracket J G H E C B D (inch) Part no.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Single Axis Electric Actuator Serriies LJ1S Slider Guide

) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3 (mm) a = 2000 L3 10 m Mey a 0 1 2 3 4 5 Transfer load m (kg) Refer to page 145 for deflection data. 88 Standard Motor/Horizontal Mount Specification Series LJ1S10 Dimensions/LJ1S101SC Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45

CV/MVGQ

Calculation: (Example) CVJ5L10-45-1G Basic weight74 (g) (10) Additional weight 6.5/15 stroke Cylinder stroket 45 stroke Weight of bracket 7 (g) (Axial foot style) 74 + 6.5/15 x 45 + 7 = 100.5 g Mounting Bracket Part No. Bore size (mm) 10 CJ-L010B CJ-F010B 16 CJ-L016B CJ-F016B Other than the models listed in How to Order, the following auto switches are applicable.