EXxx-OMY0006CN

F_Source/Destination_Address (F-Address) F-Source F-destination F-Address F-Address F_WD_Time F_WD_Time PROFIsafe ms F_SIL SIL F_iPar_CRC i-Prameters F_Par_CRC F-Parameters CRCF-Parameters F-CPU Failsafe controller, safe controller F_Destination_Address F-Parameter (F-Parameter) F-I/O device Failsafe I/O I/O 100 No.EX##-OMY0006CN F-Slave Failsafe slave F_Source_Address F-Parameter

Rotary Cylinder Series MRQ Size: 32, 40 1

DGraph (2) Cylinder Output on the Retracting Side (Double acting) 20150 1500 Tube bore size [mm] 100 1000 40 Side load Balance weight 40 50 400 500 32 20 25 30 200 250 300 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 15 150 Allowable Side Load on the Piston End (Nm) 10 100 Stroke of linear part Size 40 5 10 15 20 25 30 40 50 75 100 4 5 40 50 32 40 14 14 13 13 13 12 12 11

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

53

Wired remote controller HRS HRS CV004 1 HRS 090 Accessories HRS 100/150 Symbol Accessories Nil None 1 With cable (Approx. 20 m) 2 With cable (Approx. 50 m) 3 With cable (Approx. 100 m) HRSH 090 HRSH 090 HRSH HRSE HRZ HRZD Wired remote controller Displayed items Operable items HRW Circulating fluid discharge temperature Operation start/stop Circulating fluid discharge set temperature Circulating

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

Clean Room Rodless Cylinder Series CYP ø15, ø32

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x L

Plug-in/Plug Lead: Single Unit

with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Bracket 1 2 Normally closed Normally open Nil: Without bracket F: With bracket AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port Thread type F Nil Rc For type W, DC voltage is only available. G N T NPT NPTF Bracket is mounted. External pilot type is not available.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.73 1 Therefore it can be used. 8-17-5 5 Series CYP Model Selection 3 Caution on Design (2) Table Deflection Note) Table deflection due to pitch moment load Table deflection due to yaw moment load Table deflection due to roll moment load Guide central axis F A F F L L A L Guide central axis A M1 = F x

PSxx-OMT0001CN

) EH5 kPa EH5 kPa EPL:25kPa EPH:50kPa -46No.PS-OMT0001CN-E 4 (1)(100 kPa200 kPa) (2) () (1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2

25

Ground with a ground resistance of 100 or less. F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.

Compact Cylinder

(Note: Reed auto switches for 100 VAC and 100 VDC are not within the specification.

PSxx-OMR0001CN

() () ISA3-G () () ISA3-H ON OFF () () ON() OFF() -44No.PS-OMR0001CN-J 4 (1)(100 kPa200 kPa) (2) () (1) (2) 1 () (3) -45No.PS-OMR0001CN-J 4 2 [F 0] [F] 2 2 [][] 2 F 0(Unit) [ PA] kPa 47 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 48 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF F 2(oUt2) () [ ---] 50 F 6( FSt) [ 0.0] 0.0 51 F10( SUb) [ LEvEL] 52 F80

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

Fieldbus system EtherCAT compatible SI Unit

Assigning positive value: Input the required data x 100 in decimal system. Example: +10.50 V is assigned --Assign 10.50 x 100 = 1050 by CoE object. Assigning negative value: Convert the absolute value x 100 to be assigned in 16bit binary. Then, change the most significant bit to "1" before inputting.

Process Pump

Note) One of Nil, F or N is entered as thread symbol.

Electric Actuator Triple Axis P&P Unit

x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 92 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) C section detail (S=2/1) 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller

ZPT/ZPX

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9