60

23 23 (E) 85 73 D 25.5 D F I 280 F I 300 26 1.6 Width across flats G (E) Width across flats G E 14 E J J 16 22 A A (C) C (C) C 14 2 x H 2 x H Port size Port size 2 x 5.3 2 x 5.3 Mounting hole Mounting hole Width across flats 27 Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D 32 J Width across

Digital Flow Switch

0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output current from the

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

air-filter-e

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

Air Preparation Equipment

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

MGZ Series

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Parallel Style Air Gripper: Wide Type Series MHL2

D E F G H 54 96 116 Model MHL2-20D MHL2-20D1 MHL2-20D2 58 100 120 71 113 133 38 80 100 82 142 162 122 222 262 160 260 300 32 68 88 D(mm) Note 1) J dimension is at fully closed.

Soft Start-up Valve

[115 VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + u f Light/ surge voltage

Soft Start-up Valve

VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

IZS30_eng

The place where ambient humidity exceeds 35 to 85% RH. c. The place where dew condensation is generated due to sudden temperature change. d. The place where there is corrosive gas, inflammable gas, and volatile inflammable substance is stored. e.

Possible to transfer a workpiece at low-speed.

A33 A34 A43 A34 A37 C 7 C 7 C12 C11 C12 -X 6 -X 6 Chart 3, 4, 5 Chart 3, 4 Chart 4, 5 Combination is available only when all the conditions are fulfilled among the nation chart above.

AC Servo Motor Driver (CC-Link Type)

(One station of programmable driver remote device station) (c) Max. number of connected units: 42 Note that the following conditions must be satisfied. {(1 a) (2 b) (3 c) (4 d)} 64 a: Number of 1-station occupying units b: Number of 2-station occupying units c: Number of 3-station occupying units (not available for LECSC-) d: Number of 4-station occupying units (not available for LECSC-)

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Flow Control Equipment

When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D. Therefore, there is no time loss associated with the pressure transmission lag indicated by the line from C to E, as in the case of meter-in control that is effected through the use of a speed controller.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

Fieldbus system EtherCAT compatible SI Unit

, dual-side D code Plug, Straight 5 m EX9-AC100EN-PSPS: Cable with M12 connector, dual-side D code Plug, Straight 10 m EX9-AC005EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 0.5 m EX9-AC010EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 1 m EX9-AC020EN-PAPA: Cable with M12 connector, dual-side D code Plug, Angle 2 m EX9-AC030EN-PAPA: Cable with M12 connector

S

P I S T O N R O D A I R H Y D R O TYPE P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) P I S T O N R O D D E F L E C T I O N (REFERENCE FACTOR) For a concentrated load at the center of the housing. For a concentrated load at the center of the end plate.