Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

Heavy Duty Stopper Cylinder

Note 5) Dimensions other than those marked (LA) are the same as the basic type (no locking type). 598 RS2H Series Auto Switch Mounting 1 Auto Switch Proper Mounting Position (Detection at Stroke End) D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A B Auto switch Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-M9AV D-M9V D-M9WV D-M9A D-A9 D-A9V A 9.0 B 23.5 A 11.0

Ejector Valve Unit, Series ZYY/ZYX

degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17mA or less (when 24VDC is ON) 25mA or less (when 24VDC is ON) 17mA or less (when 24VDC is ON) Current consumption 0.2MPa {2.1kgf/cm} Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5MPa {5.1kgf/cm} is applied for 1 second or less.

AC Servo Motor Driver (CC-Link Type)

Power supply is 1-Phase 200 VAC Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) MCCB CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P3 P1 (Note 1) P2 P4 PE CNP2 P [2] [3] (Note 2) C D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Power supply input terminal: Supply specified power supply. [2] Connect the motor

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

OMR0032

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

Guide Table Series MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Short Stroke Electric Actuator Series LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Compact Guide Cylinder

D-G

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, D-R80, D-T79.

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs

ZP

D. Applicable tube O. D.

CLQ

Minimum Stroke For Auto Switch Mounting (mm) D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V No. of auto switches mounted D-A9 D-M9 D-A79W 1 pc. 2 pcs. 5 5 5 10 10 15 15 15 15 20 20 20 10 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Nozzle Type Ionizer

d A IZN10E-01 02m06 6 3.5 IZN10E-01 02m07 1/4" 7 34.7 26 2 x M3 x 0.5 thread depth 10 11 291 *1 Dimension of the resin part in described in the Mounting Warning note 3 (page 24). 18.31 One-touch fitting (Elbow) IZN10E-mm 16 17 D B C Applicable tubing O.D. d 180 [mm] Model d B C D IZN10E-mm16 6 22 16 11.5 IZN10E-mm17 1/4" 24.5 18.5 12 Female threads for piping (Rc1/8) IZN10E-11mm 14 Rc1/

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Rated voltage 1 2 3 4 5 6 7 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D: With connector T: Condait terminal E: Grommet terminal type has been discontinued.