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Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

(kPa) 50 50 20 20 e w q Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.9 1.1 0.7 Right Left 1/4 to 1 Adsorption nozzle diameter (mm) Adsorption nozzle diameter (mm) turn Completely closed Indicator light ON Indicator light OFF Air Pressure Circuit/Principle r Re-adjust the needle so the indicator light turns ON only when the work adsorption is steady.

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

J X C E H Electric equipment Actuator Model Controller Stroke example: Controller type For LEFS25FB-100B-S1CE17, E EtherCAT specify LEFS25FB-100.

75.2 40 9 18 5 48 1/43/81/2 AC40-06-B 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 1 1 AC60-B 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications With barb

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

, 63 CE1B Both ends tapped type: Bore size Stroke 4 x N through 8 x O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5

Refer to back page 50 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.

Light /Surge voltage suppressor Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal Coil voltage 1 2 3 Stations 0 1 U side 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side Function Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC specification.

50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 0.3MPa 0.3MPa 0.3MPa 0.3MPa 30 30 0.4MPa 0.4MPa 0.4MPa 0.4MPa 0.5MPa 0.5MPa 0.5MPa 0.5MPa 20 20 0.6MPa 0.6MPa 0.6MPa 0.6MPa 10 10 H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang

(with polarity protection) Power consumption 50 mA or less -50No.PF-OMN0005-E Model PFMV3 Enclosure IP40 Operating temp. range Operating: 0 to 50 oC; stored: -10 to 60 oC (no frezzing or condensation) Operating humidity range Operating and stored: 35 to 85% R.H.

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

for 1/4" (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting for 1/4" N9: With One-touch fitting for 5/16" SX 000-50-3AP PG PH SX 000-50-4AFor 45(N) (Flat ribbon cable) SX 000-50-5ASX 000-50-6AT T1 For 45 (Terminal block) SX 000-50-7A1-6-110 Base Mounted Series SX3000/5000 How to Increase Manifold Bases (1) Loosen bolt (a) fixing the manifold base until it begins

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o