Vacuum Unit

C E J K P Nil Without option V V V V B With DIN rail mounting bracket3 V V V V Example ZK2Q00R5NC1A-06 ZK2Q00R5NC1A-08 D With common release pressure supply (PD) port V V V V 4 ZZK204A-P2P-B 2 When more than one option is selected, list the option symbols in alphabetical order. (Example -BD) 3 The DIN rail should be ordered separately.

24

v v v v v v -XC89W v v v v v v v -XC91 v v v v v v -XC92 v v v v v v v -X144 -X867 D-X 429 B C O N T E N T S Compact Guide Cylinder MGP Series PCompact Guide Cylinder/Basic Type MGP-Z Series How to Order Page 432 Specifications Page 433 Clean Series Page 435 Water Resistant Cylinder Page 435 Cylinder with Stable Lubrication Function (Lube-retainer) Page 436 Guide Unit with Lube-retainer

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

CDRB2BW10/15-S CDRB2BW20/30-S CRB2 Circumference divided in 6 equivalants CRBU2 Including CRB1 MSU A port B port CRJ A port B port CRA1 CRQ2 MSQ MRQ D20A port B port A port B port (34.5: Connector type) 1 Auto switch Auto switch 2 15 20.5 (26.5: Connector type) 1 The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Cylinder with Lock

Mounting Symbol Description Single rod Double rod B Basic v v L Axial foot v v F Rod flange v v G Head flange v v C Single clevis v D Double clevis v T Center trunnion v v Pivot bracket Number of auto switches Nil No bracket N Pivot bracket Cylinder stroke [mm] Refer to page 26 for standard strokes.

Rotary Actuator

V V V V V V Single shaft with four chamfers X V V V V V V V V V Double shaft with key Y V V V V V V V V V Shaft type Standard Double shaft with four chamfers Z V V V V V V V V V Single round shaft T V V V V V V V V V Double shaft (round shaft, with four chamfers) J V V V V V V V V V Double round shaft K V V V V V V V V V Cushion None V V V V V V V V V Air cushion V V V V V With auto switch

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

Table of Contents

Example: Analog output = 1 to 5 [V] F.S. = 5 [V] 1 [V] = 4 [V] 3 [% F.S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 0.12 [V].

CJ2

V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV H7A1 H7A2 H7B H7C H7NW H7PW H7BW H7BA IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indication

Magnetically Coupled Rodless Cylinder

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V D-M9; D-M9;V D-M9;W D-M9;WV D-M9;A D-M9;AV D-A9; D-A9;V K dimension (Switch rail height) Bore size 6 3 6 11 16 20 26 28 5.5 5.5 5.5 6 6 7.5 6.5 1.5 1.5 1.5

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

V100

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

AC Servo Motor Driver (CC-Link Type ）

B1 B1 Electromagnetic brake Electromagnetic brake Switch Switch lock lock 24 V DC power supply for electromagnetic brake 24 V DC power supply for electromagnetic brake or VAR VAR U B U B lock lock B2 B2 The surge absorber (VAR) must be installed between B1 and B2.

AC Servo Motor Driver

10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 10M[pulse] 1M[pulse] 0 0 10M[pulse] 1M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses) D Bus voltage

5 Port Solenoid Valve

PROFINET EtherNet/IP Nil + COM v v v v v v N COM v v v v v v B B B B B Stations 1 2 3 4 5 n D side U side * Stations are counted from station 1 on the D-side. * Leave the box blank for without SI Unit (SD0m, SD60). w Cylinder port size o Input block type (Enter only for S kit compliant with EX250.) u I/O Unit stations (Enter only for EX600-compliant S kit.) 03 3/8 04 1/2 B Bottom ported

Refrigerated Air Dryers

V V V V V V V V V V 8E V V V V V V V V V V 11E V V V V V V V V V V 15E1 V V V V V V V V V V *1 When multiple options are combined, indicate symbols in alphabetical order.

NCG/CG1

D-M9 A/D-M9 AV (With indicator light) D-M9NAV V A B 9 M D A B 9 M D A N 9 M D D-M9PAV D-M9PA Auto switch part no.