Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange S T D S T R O K E/H U N D R E D T H S O F A N I N C H B O R E S I Z E 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI MaxImum Operating

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(S) means 1-phase 200 V AC power input and (T) means 3-phase 200 V AC power input in the table. Note 2. MFG.:Mitsubishi Electric Corporation (c) Power supply This driver can be supplied from star-connected supply with grounded neutral point of overvoltage category III set forth in IEC/EN 60664-1.

Thermo-chiller

Cooling method Nil None C With inverter for compressor M Deionized water (Pure water) piping P With inverter for pump A Air-cooled refrigeration Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) When multiple options are combined, indicate the symbols in alphabetical order.

AC Servo Motor Driver (CC-Link Type ）

[C][0].

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

Basic type / Direct mount type Series CY3B/CY3R

300 Amount of Adjustment for Adjusting Bolt and Shock Absorber 50, 100, 150, 200, 250, 300 500 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 20 25 32 40 750 1000 Plate B Plate A Adjusting bolt 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 CY3B CY3R 1500 CY1S Shock absorbers 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 1500 CY1L Note) Intermediate stroke

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

V

L: L type plug connector with lead wire L: O type plug connector without connector T Y P E O F S E A L C O I L V O LTA G E 0 Metal 1 Rubber 3 110VAC (50/60Hz) 5 24VDC 6 12VDC M: M type plug connector without connector P I L O T VA LV E S P E C I F I C AT I O N S Note ) The C kit is applicable to 200/220VAC.

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand

NCA1

CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin

10

24 VDC With surge voltage suppressor 4 N 100 VAC 3/8 7 P 110 VAC A B C D E F G H J K L M N P 5 Q Size 3 3 200 VAC N.C. 1/4 8 R 230 VAC 10 (N.C. only) 6 N.O.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type With strain relief Conforming to MIL-C-83503 Flat ribbon cable connector Socket: 20 pin MIL type With strain relief Conforming to MIL-C-83503 D-sub connector Conforming to MIL-C-24308 JIS-X-5101 Terminal block (M3) 9 pins Terminal block

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Port size 1/8, C6, C8 A, B port Applicable flat ribbon cable connector Socket: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) (MIL-C-83503 compliant) Internal wiring In common between +COM and COM (Z type: +COM only) Rated voltage 24, 12 VDC Note) The value is for manifold base and individually operated 2 position type.

IDG

200 300 400 500 AMG Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) AFF IDG50 (Type B products group) IDG60 (Type A products group) AM 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) Misc. 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 50 50 0 200 400 600 800 0 200

Programless controller Step motor (servo 24 VDC)

LEFB16 LEFB25 LEFB32 Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700

Vacuum System Peripherals:

Nil L C CL CN Grommet type N 15 Connector type NPN open collector, double output No analog output, 3 turn-set NPN open collector, double output No analog output, 200 degree set NPN open collector, single output With analog output, 3 turn-set NPN open collector, single output With analog output, 200 degree set PNP open collector, single output No analog output, 200 degree set Manual override