CQ2

Spring return Spring extend Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l X 55 l M3 X 25 l X 30 l M3 X 25 l X 30 l M5 X 25 l X 30 l M5 X 30 l X 35 l M5 X 30 l X 35 l M5 X 35 l X 40 l M6 X 45 l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l M5 x 30l x 35l M5 x 35l x 40l M6 x 45l x 55l 6.5 6.5 5 5 7.5 7.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 7-6-45 46 Series CQ2 Construction Spring extend Spring return Port size For M5 x 0.8 With boss in head side Rod end male thread Built-in One-touch fittings Courtesy

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

7 2 x M5 x 0.8 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 2.4 mm2 Effective area: 2.4 mm2 Weight: 5.3 g Weight: 4.8 g Extension Fitting: M-5J Nipple: M-5N Width across flats 7 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 4.0 mm2 Effective area: 4.0 mm2 Weight: 3.6 g Weight: 1.5 g Universal Nipple: M-5UN Bulkhead Union: M-5E M5 x 0.8 M8 x 0.75

Air Cylinder

x 0.8 18 15.5 34 13 14 8 35 5 26 M4 x 0.7 5 6 4 6 20 45 (53) 3 32 44 3 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 38.5 17 16.5 10 40 6 31 M5 x 0.8 5.5 8 4 6 22 45 (53) 3 36 49 3.5 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 45 17 20 12 40 6 38 M5 x 0.8 5.5 10 4 7 25 45 (53) 3 44 58 3.5 M10 x 1.25 40 Up to 300 301 to

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Electric Actuators

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

Compact Vacuum Ejector Series ZA

KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

3 Port Solenoid Valve Metal Seal Series VZ200 1

x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200-32A-2 M5 x 0.8 Rc 1/8 VZ212--M5 VZ222--M5 Body ported VP Port size Applicable valve model VG VV3Z2-20-061 VP Blanking plate VVZ200-32A-1 VVZ200-31A-1 S070 Screws and Gasket Assembly Part No.

Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Formula

Compact Cylinder with Lock Series CLQ

x 0.8 Rod side cylinder port 2 x 5.4 through 2 x 2 x 9 depth of counterbore 7 depth VH Q H thread effective depth C 5.5 M5 x 0.8 unlocking port (Unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 K M E S 3.2 2 x 2 x M5 x 0.8 3.2 Head side cylinder port 16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

M5 x 0.8 3 position 4 position 65 Note) Please contact SMC for the weight of elbow fittings.

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l