TABLE OF CONTENTS

COIL NO. 8.4 4.8 9.7 12.0 19.5 24.0 38.0 7.7 4.4 8.9 11.0 18.0 22.0 35.0 5.0 3.0 6.0 8.0 12.0 16.5 24.0 15-17040-3 15-17040-4 15-17040-5 15-17040-6 15-17040-9 15-17040-10 15-17040-13 15-17039-3 15-17039-4 15-17039-5 15-17039-6 15-17039-9 15-17039-10 15-17039-13 *15-17034-3 *15-17034-4 *15-17034-5 *15-17034-6 *15-17034-9 *15-17034-10 *15-17034-13 43.0 76.0 120 61.0 40.0 70.0 110 56.0 28.0

ZP

P ZPR02U 2 4 6 8 1.2 1.6 2.5 2.5 2.6 4.8 7 9 ZPR04U ZPR06U ZPR08U 20 65.5 25 70.5 0.8 1 Applicable Tubing Applicable tubing O. D.

MXS

9 & #2 to #5 1 set including !7 to !9 & $1 to $3 1 set including !7 to !

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

EXxx-OMN0037CN

8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

DOC1020530

is displayed. -9 to 9 mm 10STM 4 Cumulative feedback pulses Feedback pulses from the motor encoder are counted and displayed.

CXT

D-A80C D-A79W D-F7V D-F7BAVL D-F7WV D-J79C Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 38.5 42 38 41.5 6.5 9 6.5 9 6 (6.5) 9.5 13.5 3.5 6 34 37.5 9.5 13.5 6.5 9 35 38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21

Environment

9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

HRL

Standards RS-232C One thermo-chiller for one master RD 2 RD 2 SD 3 SD 3 Circuit diagram SG 5 SG 5 This product Master Do not connect with other pins. 1 6 9 5 D-sub 9-pin female (socket) type 9 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Optional Accessories Consumables List Part no. Description Qty.

Thermo-chiller

(For communication cable) Weight*9,*12 kg 134 *1 Use fluid that fulfills the conditions below as the circulating fluid.

MQQ

38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5 47 7 10 25.5 16 5.4 9 48.5 10 5 7 10 to 60 M5 x 0.8 M6 x 1.0 89 79 10 10 40 12 52 8 10 28 20 5.4 9 55 10 6 7 10 to 50, 75, 100 M6 x 1.0 M6 x 1.0 96.5 84.5 12 12 45 13.5 60 4.5 10 12 34 25 5.5 9 58 10 49.5 7 7 10 to 50, 75, 100 M8 x 1.25 M6 x 1.0 116 104 13 16 52 17.5 69 5 14 12 40 28 5.5 9 71 10 57 10 7

MXW

9, @0, @1 Seal kit includes !9, @0, @1.

Table of Contents

(Specify a model with 9 to 16 stations by using the manifold specification sheet.)

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

2 Phase Stepper Motor/Without Motor Brake Series LXS

kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 9 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 270 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 5H9

4/5 Port Air Operated Valve Series SYJA3000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5

CJ5-S

87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.