ZX

Piping specifications Model Nil Grommet (0.6 m) L Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) Symbol S Applicable model PV, V port size Applicable nozzle dia. 0.3 to 0.7 B Applicable nozzle dia. 0.5 to 1.2 Nil M5 x 0.8 Y M6 x 1 (Option) Other caution Circuit and Wiring Caution It might not be possible to successfully pick a workpiece if a picking nozzle or a picking pad that is

HRX-OM-W004

. 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-3 3.5.1 Precautions after wiring and before communication . 3-3 3.5.2 Precautions for communicating . 3-3 3.6 Setting and checking . 3-4 3.6.1 Setting and checking items . 3-4 3.6.2 Setting and checking . 3-5 3.7 Communication sequence

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

HRX-OM-W069

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. Note 3) With a low number of operating cycles, even a valve with a small Cv factor can be operated.

E-P HYREG

mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot may be mounted.

Air Cylinder

D-A59W Bore size (mm) A B A B A B A B A B A B A B A B A B A B A B 40 50 63 80 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 9.5 8.5 5.5 4.5 3 2 5 4 2.5 1.5 6 5 3.5 2.5 11 10 0 0 1.5 0.5 0 0 12.5 11.5 8.5 7.5 6 5 3 2.5 5.5 4.5 9 8 6.5 5.5 14 13 2.5 1.5 4.5 3.5 3 2 16.5 13.5 12.5 9.5 10 7 7.5 4 9.5 6.5 13 10 10.5 7.5 18 15 6.5 3.5 8.5 5.5 7 4 100 18 16 14 12 11.5 9.5 9 6.5 11

Booster Regulator/Air Tank

valve port Rc 3/8 Safety valve port Rc 3/8 250 A (mm) A 60 130 VBAT05 VBAT10 Tank model 17 Air Tank Series VBAT Dimensions: CE Certified Product VBAT05A-Q Material: Carbon steel Connected to VBA10A, 11A Safety valve port Rc 3/8 Tank IN port Rc 3/8 Booster regulator IN port Rc 1/4 Spare port 2 x Rc 1/2 EXH: Rc 1/4 60 60 OUT (370) (307) Tank OUT port Rc 3/8 257 156 163 4 x 11 32 32 100 Drain

S Couplers Series KK/KKH/KK13

As a rule, they should be tightened 2 to 3 turns with a tool after first tightening by hand.

C95

3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

ISO Standard Hydraulic Cylinder

Note 3) When tightening an auto switch mounting screw (M2.5), use a watchmakers screwdriver with a grip diameter of 5 to 6 mm. Also, set the tightening torque to be 0.05 to 0.15 Nm.

Return Filter

Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 (7) O-ring Refer to 6. Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 (8) Seal washer Refer to 6. Maintenance parts (3) Replacement O-ring and seal bracket. See 3. Specifications 1 11 / 17 FGX-OM-F001-A 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. Note 3) With a low number of operating cycles, even a valve with a small Cv factor can be operated.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. Note 3) With a low number of operating cycles, even a valve with a small Cv factor can be operated.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

VCL

Class 3 v v v Class 2 v v Port size 1/8 ( 6A) 1/4 ( 8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB VCL Electrical entry Orifice diameter G Grommet C Conduit VCS Class 3 v v v v v Class 2 v v v v Orifice dia. (mm) 2 3 4 5 7 10 Class 4 v v v v v Symbol 2 3 4 5 7 10 VCW Refer to the below table for orifice and port size combinations.