REA/REB CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 !2 @1 i !3 q @0 !7 !9 #2 !1 w r t u @8 o #4 e !5 !6 #3 !0 #0 @9 #1 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Aluminum alloy Plate B q !
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x
G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97 119 152 M6 M6 M8 M8 M10 M10 M12 M16 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 6 6 7 7 11 11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 10 10 10 10 14 14 26 31 36 40,5 45 48,5 52 57 65 80 190 213
Magnet) Cylinder model Mounting bolt size For Lateral Mounting Cylinder model Mounting bolt size For Axial Mounting Material: Structural steel Material: Structural steel C D A B 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 CDUJB12-5 -10 -15 -20 -25 -30 CDUJB16-5 -10 -15 -20 -25 -30 CDUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDUJS12-5 -10 -15 -20 -25 -30 CDUJS16-5
IN OUT How To Order B VHS 30 N 02 Z X513 EXH Residual Pressure Relief 3 Port Valve Dimensions mm With External Epoxy Coating, Stainless Fasteners B C D E F G H I Model A Body Size Symbol 20 30 40 VHS20 VHS30 VHS40 59 78 107 20 29 39 40 53 70 34 46 63 22 45 55 58 33 42 44 28 30 36 45 55 63 Applicable Model AC21 AC31 AC41 Name Plate In Imperial Units (PSI, F) Caution Thread Type N NPT If
H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
PV SV HRS090 Series 5.19Alarm customizing function 5-55 HRX-OMT002 Chapter 5 Display and setting of various functions 17. Set the product operation when "Circulating fluid discharge pressure drop" alarm is generated with [] key or [] key, and press [SEL] key to enter.
data. 148 3 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202PA 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20 8H10 depth 10 LJ1 LG1 LC1 LX LC6D/LC6C Switches Encoder signal line Bending radius 80 Motor power line Bending radius 80 35 8H10 depth 8 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55
to page 45 for deflection data. 6 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H20PA 12.5 9.5 Work piece mounting reference plane 110 4 x M6 x 1 thread depth 15 67 20 4 x M8 x 1.25 thread depth 20 8H10 depth 10 Cable entry side Body mounting reference plane 8H10 depth 8 Z section detail 130 52 52.5 Z section Stroke + 150 (table movement range) 22 190 3.3 92 55
NN S 50 63 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
Speed 600 mm/s REAR20 3 1 9 9.5 5.2 22.8 9 6 39 37.5 39 36 38 36 7.5 21 M6 x 1 x 8 REAR25 3 1 8.5 9.5 5.2 27.8 8.5 6 44 42.5 44 41 43 41 6.5 23.5 M6 x 1 x 8 REAR32 3 1.5 10.5 11 6.5 35 10.5 7 55 53.5 55 52 54 51 7 29 M8 x 1.25 x 10 Direct Mount Type REBR REAR40 5 2 10 11 6.5 43 13 7 65 63.5 67 62 66 62 8 36 M8 x 1.25 x 10 LD MM N P PW Q WS Z QW T W X Y K L M Model REAR10 3.5 M3 x 0.5 4.5
CV MVGQ CC RB J D-X 20Data 10-2-55 55 Series REAH Construction: 10, 15 Single axis type: REAH y !4 !8 i !2 @1 !3 q @0 !7 !9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com #2 !1 w r t u @8 o #4 e !6 !5 #0 @9 #1 #3 !0 @3 @5 @6 N@4 REAH10 @7 @2 Component Parts No.
10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55
LED . 28 8.1 LED . 28 8.2 LED . 28 9. . 29 9.1 . 29 9.2 No. . 29 9.3 / . 29 9.4 . 30 9.5 . 30 10. . 32 10.1 . 32 11. . 47 11.1 . 47 11.2 . 50 11.3 . 52 11.4 . 53 12. . 54 12.1 . 54 12.2 . 54 12.3 . 55 (1) . 55 (2) () . 55 (3) . 55 12.4 . 56 12.5 . 56 13. () . 57 13.1 . 57 13.2 . 58 14. . 59 14.1 . 59 14.2 No. . 59 [1] . 59 [2] . 60 2 - [3] . 61 [4] HOLD . 61 [5]
M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40