JXCx-OMT0032CN

3 2 1 0 ID 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 40 - 13.

CJ2

1 !

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Mini Free Mount Cylinder

1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

Manifold Specifications

(Valve) DXT199-22-3A 1 pc. (Blanking plate assembly) DXT192-52-1-4A 3 pcs. (Connector assembly) DXT192-52-2-4A 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

PFxx-OMU0002

Nominal thread size Required torque Port size Width across flats of attachment Rc1NPT1 36 to 38 Nm 1 45 mm Rc1 1/2, NPT1 1/2, Rc2, NPT2 48 to 50 Nm 1 1/2 60 mm 2 70 mm 16 No.PF-OMU0002-D Wiring Connection Connections should only be made with the power supply turned off. Use a separate route for the product wiring and any power or high voltage wiring.

VCA

AXT632-68-2 VCA23-VVCA20-3-1 VV2CA2Material Mounting screw Steel Manifold valve Note 1) Gasket HNBR Manifold base Al Note 1) Gasket is included with manifold valve . Series VCA30/40 Series VCA30 Series VCA40 Material Description Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Vacuum Regulator

40 8 x 6.5 55.7 51.3 55.7 51.3 Pressure gauge Rc 1/8 Pressure gauge port 107 One-touch fitting Air 21.6 70.4 Fitting Part Dimensions (mm) 26.5 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 8 8.5 11 14 Elbow V 26.6 40.5 65 5.2 6 1/4" 8, 5/16" 10, 3/8" 1 1.5 4 7 27.5 27.5 28.5 30.5 21 21 21 21 10.5 10.5 10.5 11 N P A B IRV20A-lllZ : With digital pressure switch 64.5 53 52 U V 41

S Couplers

4") 8 (1/4") 9 (3/8") 12 (1/2") Applicable hose I.D.

Air Slide Table Series MXW

GG Model MXW20-150 48 169 41 66 113 6 216 1 101 412 29 -X MXW20-175 52 194 66 91 140 6 237 1 128.5 462 50.5 MXW20-200 48 219 91 116 164 7 264 1 152 512 56 Individual -X MXW20-225 52 244 116 141 189 7 288 1 177.5 562 73.5 MXW20-250 48 48 269 141 166 215 8 312 2 203 612 59 163 Series MXW MXW25/Stroke: 100, 125, 150 mm Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) J 20 Width across hexagon

Precautions 1

Auto switch mounting Bore size (mm) 40 32 25 20 D-A9 D-M9 D-M9W Note 1) Note 1) Note 1) Note 1) 1 BM2-040 1 BM2-032 1 BM2-025 1 BM2-020 2 BJ3-1 2 BJ3-1 2 BJ3-1 2 BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7NF BM2-040 BM2-032 BM2-025 BM2-020 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-040 BA2-032 BA2-025 BA2-020 Note 1) Two kinds of auto switch mounting brackets are used as a set.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

30 30 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 16 16 16 4 5 5 12 15 15 M6 x 1 M8 x 1.25 M8 x 1.25 Up to 1000 Up to 1000 Up to 1000 39 42 52 208 228 254 436

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

5 Port Air Operated Valve SYA3000/5000/7000 Series

] 0.40 0.72 [0.37] 0.47 1.8 3 position 1.4 3.3 [0.84] Exhaust center Pressure center 115 (52) 0.36 [0.60] 0.85 [0.28] 1.8 0.40 0.48 Note 1) [ ]: denotes the normal position.

mb1

M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

70astamb1

M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10 14 18 18 22 26 M14 x 1.5 10.5 M18 x 1.5 M18 x 1.5 12 14 15 11.5 17 M22 x 1.5 M26 x 1.5 With Rod Boot 151 to 200

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth