MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) -X Lead wire length 205 m None Nil L 0.5 m 3 m Z N Data Applicable for the connector type (D-C) only.

Speed Controller with

1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Industrial Filters

Nominal filtration accuracy (m) Nominal filtration accuracy (m) 5 10 20 005 010 020 Specifications Micromesh Elements Model EM100 EM500 Materials Stainless steel 304 Stainless steel 316 Stainless steel metal mesh has high filtration accuracy.

25

color: Gray) Power supply cable full length IZS CP X13 Type 40 41 For IZS40 For IZS41/42 Symbol 01 02 Cable full length 1 m 2 m Model with Made-to-order power supply cable Available in 1 m increments from 1 m to 20 m.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

L plug connector: VQD1151l-lL-M5 M plug connector: VQD1151l-lM-M5 5 5 5.5 SY 4(A) 2(B) SYJ SX VK VZ Lead wire length: 300mm Direct manual override Light 27 VF VFR SMC 17.6 11.2 3(R) VP7 9 3 2-3.5 Mounting hole 10.9 9.1 VP4 5.5 VQ VQ4 33.5 38 37 12 28.5 VQZ 1(P) 1(P) VQD 4-M5 X 0.8 5.5 (P, A, B, R port) 13 VZS L plug connector (L) 49 50.5 VFS M plug connector (M) VS VS7 1.13-7 Series VQD1000

HRX-OM-W060

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Precision Cylinder Series MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty.

VF1000-OMP0001

(M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P)

VVX31/32/33

47 58 67 V 102 114 123 S 39 41 44 T 59 62 64 U 92 95 97 Q 23 25 28 L 6 9 9 M 45.5 50.5 50.5 N 20 23 25.5 K 36 46 46 F 33 34 34 H 24 25 25 J 30 40 40 D 22 24 24 A 40 44 44 B 20 22 22 C 9 10 10 Model VVX31 VVX32 VVX33 TI/ TIL PA PAX PB 17-3-91

VKF300

Moreover, when used for vacuum, use type m. 4. Cannot be used as an emergency shutoff valve, etc. The valves presented in this catalog are not designed for safety applications such as an emergency shutoff valve. If the valves are used in this type of system, other reliable safety assurance measures should also be adopted. 5.

AMR3000 to 6000

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)

VM

Push Button (Mushroom)/VM220-02-30R, B, G, Y/VM230-02-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. 3.5-22 VM200 Series VM200 Push Button (Extended)/VM220-02-32R, B, G, Y/VM230-02-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.