For positive pressure 80 ISE 02 N M For vacuum/ compound pressure 80 ZSE 02 N M Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English
Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications type: VT/VO325V) 02 1 G VT325 SY Thread type SYJ Nil F N T Rc G NPT NPTF For manifold: Enter VO.
HRS 20 A 060 Cooling capacity Option 060 4900W/5900W (50/60Hz) Null None B Earth leakage breaker Cooling method J Automatic water-supply A Air-cooled refrigerator type M Pure water piping W Water-cooled refrigerator type W Fixed SI unit(1) 1) Unit : MPa/ (degree Celsius) Piping thread type Null Rc Power supply F G (PT-G conversion fitting is included) 20 1-phase AC200 to 230V(50/60Hz) N NPT
0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.
0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.
L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.
Electrical entry 3 Note) Compatible with ZX1-VJ324Mand ZX1-VJ314only. 5 6 V S R L LN LO M MN MO G H Connector (0.3 m) Connector (w/o lead wire) Without connector Connector (0.3 m) Connector (w/o lead wire) Without connector Grommet (0.3 m) Grommet (0.6 m) Note) In the case of ZX1-VJ114, M, MN and MO cannot be used.
Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.
DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.
PA03 02: LEC-MR-RB-032 03: LEC-MR-RB-12 Set this parameter to enable the absolute position detection system. For details, refer to "LECSN-T Operation Manual, Chapter 12.
NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.
Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z : Manufactured upon receipt of order.
NVEP NVEF 3 1 r T 1 0 3 4 0 T I tffi IFTC I B"dt nowj I Rate rype I I Ports Port Size Code Max. Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.
1 u t w y CHK CHN CHM CHM CHS CH2 o !
M Contact input/output signal M Serial RS-485 communication M Analog communication (Refer to Options on page 118.) M DeviceNet communication (Refer to Options on page 118.) Wetted parts adopt the materials compatible for various circulating fluids. (Stainless steel, EPDM, etc.)
Made to Order Specifications Oil-free specifications VCB X10 17-2-25 6 Series VCB Construction q w e r Component Parts t Material Description No.
0oi q w e r t y u i !1 !2 No.
Note 5) The surface treatment of the lock nut option-J (round type) is electroless nickel plating. 487 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d 2 tubing type AS121F-M3-02 AS121F-M5-02 D2 Applicable tubing O.D. 2 A L4 D1 L3 M T L1 (Hexagon width across flats) H D3 Metric Size
Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !