Thermo-con

HEC012 1 7 3 gpm 2 4 5 6 1 1.5 3 2 0.5 gpm 2.5 0.30 MPa 0.15 MPa 40 psi 20 psi 0.25 35 Discharge pressure Fluorinert FC-3283 Discharge pressure 15 0.20 0.10 30 60Hz 0.15 Fluorinert FC-3283 10 20 Water 50Hz 0.10 0.05 15 5 60Hz Water 0.05 5 50Hz 0.00 0 2 4 6 8 10 12 0.00 0 5 10 15 20 25 30 Circulating fluid flow rate (L/min) Circulating fluid flow rate (L/min) Pressure Loss in FacilityWater

Digital Flow Switches Series PF2A

Specifications PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Air, Nitrogen Model Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit 0.5 to 10.5 l/min 0.5 to 10.5 l/min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

HEC_W-E

-4-9 4.6.5 TEMPERATURE SENSOR FINE CONTROL FUNCTION -4-9 4.6.6 SETTING VALUE MEMORY FUNCTION -4-9 4.6.7 UPPER/LOWER TEMPERATURE LIMIT ALARM FUNCTION -4-9 4.7 AUTOTUNING FUNCTION -4-10 5 NAMES AND FUNCTIONS OF COMPONENTS -5-1 5.1 HEC006 -5-1 5.2 HEC012 -5-2 5.3 OPERATION PANEL -5-3 5.4 DISPLAY -5-4 5.5 RESERVOIR CAP -5-4 6 SPECIFICATIONS -6-1 6.1 SPECIFICATION TABLE -6-1 6.2 PERFORMANCE CHART

E-P HYREG ® Series VY1

) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Shore Durometer A scale HS(5) 10 Series ZPR ZPR 10/13/16 F-0-B5 (Without Buffer/Female Thread) ZPR 20/25/32 F-0-B 5/8 (Without Buffer/Female thread) S S Applicable tube O.D.

Model Selection 1

15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

Mechanically Jointed Rodless Cylinder Series MY2

10 10 MY3M MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16

A

NAM250-N03D 38 172 76 10 NAM350-N04D 12 204 90 10 S Y M B O L S NAM450-N06D 34 225 106 10 NAM550-N10D 1" 259 122 10 NAM650-N14D 112" 361 160 10 NAM850-N14D 2" 473 220 10 Manual and Autodrain types are same overall dimensions.

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

LEF-OM002xx

600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200

Series AS-FM/AS-M/ASD-FM

0.8 Upstream pressure 0.5MPa 20 10 50 0.15 0.3 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 40 0.6 Effective area mm Effective area mm Effective area mm 0.1 0.2 30 0.4 10 5 20 0.1 0.05 0.2 10 0 0 0 0 0 Number of needle revolutions 5 10 Number of needle revolutions 5 10 10 20 0 Number of needle revolutions 2 Speed Controller for Low Speed Operation Series AS-FM Construction

MQQ

A + Stroke FZ (mm) Double clevis type/MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU Special cap bolt 10 to 40 CU CD hole H10 Shaft d9 90.5 61.5 5 84.5 4 10 10 10 to 60 107.5 70.5 8 98.5 5 12 16 10 to 60 119 79 10 109 5 14 20 10 to 50, 75, 100 126.5 84.5 10 116.5 5 14 25 10 to 50, 75, 100 148 104 10 138 6 14 28 CX +0.4 +0.2 CT B + Stroke CW CZ -0.1 -0.3 L Bore size (mm) CW CX CZ L

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

VZ5000

5 185.5 175 154 16 6 198 187.5 173 12.5 7 223 212.5 192 15.5 8 235.5 225 211 12.5 9 260.5 250 230 15.5 10 273 262.5 249 12 Stations L1 L2 L3 L4 Stations L1 L2 L3 L4 2 148 137.5 116 16 3 160.5 150 135 13 4 185.5 175 154 16 5 198 187.5 173 12.5 6 223 212.5 192 15.5 7 235.5 225 211 12.5 8 260.5 250 230 15.5 9 273 262.5 249 12 10 298 287.5 268 15 (mm) Stations L1 L2 L3 L4 11 310.5 300 287 12

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.