5 Port Solenoid Valve

SS0700-80A-2 SS0700-80A-4 SS0700-TR-l 10 S0700-GS-5 Applicable tube Applicable tube 2 Applicable tube 3 Applicable tube 4 Applicable tube 1/8" Applicable tube 5/32" Symbol C2 C3 C4 N1 N3 Gasket, Screw 10 Note 1) Gasket 10 Note 1) Clip Note) Above part number consists of 10 units. Each unit has one gasket and two screws. 2 Note 2) Tie-rod assembly Note 1) 1 set includes 10 pieces.

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

LEC-OM02904

-4 YET-60-1 q FVD2-6 YNT-1614 r FVD5.5-10 YNT-1210S s FVD22-10 YF-1E-4 YNE-38 DH-113DH-123 (1)t R38-10 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)u R60-10 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 1. 2. 8 [N m] L1/L2/L3/ L11/L12 TE1-1/ TE1 TE2 TE3 PE U/V/W/P1/ TE1-2 TE2-1 TE2-2 P/C/N LECSS1.2 15 (9) National Electrical Code , Canada Electrical Code (10) UL/cUL UL489MCCBT AC AC

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Specifications 24 VDC + 10%/5% 24 VDC + 10%/0% Item Power source for driving valve Non-polar With energy saving circuit (Continuous duty) 34 Series SJ2000/3000 EX180 Serial Wiring Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard C Z J 60 C6 5 SJ 3 1 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec

Information

15 Standard cable Robotic cable LE-CSE-Smm LE-CSE-Rmm Absolute encoder compatible Series LECSS (SSCNET III type) Option USB cable Part no.: LEC-MR-J3USB Page 16 Main circuit power supply connector (Accessory) Page 10 Setup software (MR ConfiguratorTM) Part no.: LEC-MR-SETUP221m Page 16 Driver Supplied by customer Power supply Single phase 100 to 120 VAC (50/60 Hz) 200 to 230 VAC (50/60 Hz

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8( 7.8) 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10( 9.8) 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12(11.8) 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 30 10 to 50, 75, 100 60.5 M6 x

Step Motor Controller

VAC (50/60 Hz) Single phase 85 to 132 VAC 0.4 Control power supply Allowable voltage range for control power supply [V] Rated voltage [A] Parallel input Parallel output Max. input pulse frequency [pps] 10 inputs 6 outputs 1 M (when differential receiver), 200 k (when open collector) 0 to 10 (Pulse command unit) 3 rotations Parameter setup or external analog input setup (0 to 10 VDC) USB

Modular Type Regulator Series AR

Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

100

50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The

Fluoropolymer Piping Equipment

x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 6 x 4 3 x 2 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 10 x 8 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Large Size Vacuum Module: Series ZR

(ANR)) Suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) 80 80 80 80 ZY Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 70 70 70 ZF 60 60 60 60 Air consumption 50 50 50 50 ZP Air consumption 40 40 Vacuum pressure 40 40 Suction flow Suction flow SP 30 30 30 30 20 20 20 20 ZCUK 10 10 10 10 AMJ Supply pressure (MPa

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.