42

2 B 2 B 2 B 2 B 8 A A A A A A A A B B B B B B B B VQC 4/5 7 SMC SMC SMC SMC SMC SMC SMC VQZ 6 SQ 5 VFS L1 L2 4 VFR 3 VQ7 2 44 P = 25 1 50.5 X Stations 12 Electrical entry on D side (LD) 47.7 80.8 D side 11.7 43.2 49.7 163 58.2 96.2 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 88 113 138 163 188 213 238 263

10

A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 396 Cassette Type Manifold 10-SZ3000 Dimensions: 10-SZ3000 for Non Plug-in Stations 10-SS5Z3-60D [With External Pilot Specifications] One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 25 13.3 13.3 25 (Pitch) P = 10.5 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE

Size: 1/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: Non-relieving, Option 2: -

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: Non-relieving, Option 2: -

Size: 1/2, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: Non-relieving, Option 2: -

Size: 3/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory: Bracket, Option 1: Non-relieving, Option 2: -

Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Pressure Gauge: -, Set Pressure: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Exhaust Mechanism: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

A

mm C mm S Y M B O L S NAMF150-N02 14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D Y S I Z E 150

MY1

B A 10 16 20 Mounting position A 31 24 39 B 129 86 161 Operating range l Note) 4 3 5 MY1M (Slide bearing type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1C (Cam follower guide type) B A Mounting position 16 20 A 74 94 B 86 106 Operating range l Note) 8.5 6.5 MY1H (High precision guide type) B A Mounting position 10 16 20 A 31 24 39 B 129 86 161

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D-Y69 D-Y7PV D-Y7WV 70 65 75 85 10 60 60 + 30 (n 4)/2 n = 4, 8, 12, 16 75 + 30 (n 4)/2 n = 4, 8, 12, 16 85 + 30 (n 4)/2 n = 4, 8, 12, 16 10 + 30 (n 2)/2 n = 2, 4, 6, 8 65 + 30 (n 4)/2 n = 4, 8, 12, 16 70 + 30 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

SYJ3000/5000/7000

(Pitch) P = 10.5 For (Built-in One-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/Surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/Surge voltage suppressor) + + + + + B B B B

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

C85

Same side Different sides Different sides 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-C7 D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7 50 15 10 50 + 45(n 2) D-C80 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF ) 10 + 35 (n = 2, 4...) ( n2 2 15 + 45 (n = 2, 4...) ( n 2 ) 2 10 5 65 15 10 65 + 50(n 2) D-F7V D-J79 15 + 45 (n = 2, 4...) ( n 2 ) 2 D-J79C D-A79W 60 + 55(n 2) 60 15 10 D-F7W D-J79W ) 15 + 35 (n

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

REA/REB

Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(Except 50 and 63) M12 x 1.25 x 7.5 M14 x 1.5 x 11.5 b C H B Applicable bore size (mm) 6, 10 d M10 x 1.0 H 4 B 14 C 16.2 Part no. SNJ-016B 8-15-31 31 Magnetically Coupled Rodless Cylinder Direct Mount Type Series CY1R 6, 10, 50, 63 How to Order CY1R 25 H 300 Y7BW Number of auto switches Direct mount type Nil 2 pcs. S 1 pc. n n pcs.

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.