MXQ

NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 5H9 depth 5 +0.030 0 1 NN-M6 x 1 thread depth 12 6 B A 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2

Air Slide Table Series MXS

70 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 KA 125 173 223 NA 2 2 2 2 2 4 4 4 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 64 Air Slide Table Series MXS With shock absorber (16) MXS16-BS/BT/B A 10 19 37.5 37.5 MXH 18 18 55 MXU (mm

Cylinder with Lock

D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4

VZS

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

LEC-OM069xx

(at rated speed) Torque Control Tolerance (Repeatability) 1% 1 Soft Start Time Setting*4 0 to 10 s (Can be set individually for acceleration and deceleration.) 1-4 1 Outline (contd) Encoder Output Pulse Phase A, B, Z: line driver Encoder output pulse: any setting ratio (Refer to 4.4.5.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

O.D: 4, 5/32" U side D side L3 (L4) C6: 18.1 N7: 20.6 Manual override switch C6: 9.6 N7: 12.1 (9.1) Valve lock switch (1.8) 8 (16.3) 20.8 56.2 5.5 (7) 35 10 17.2 19.3 PE X DIN rail B A B A B A B A B A B A Silencer (Air discharge port) (Built-in silencer spec.) 9.9 Manual override (Locking type: Press, then rotate.) 4(A) port side: Blue 2(B) port side: Yellow DIN rail holding screw Approx

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Stopper Cylinder

7.5 7.5 2 x (Rc, NPT, G) 1/8 Z 20 24.5 8 T 0 0.1 E M J R38 25 14 28 B + Stroke 4 x N through 8 x O counterbore E M 100 + Stroke A + 2 stroke RSQ RSQ Mounting: Both ends tapped RSQA RSG RS2H O1 thread [mm] RSH Bore size B O1 R 32 48 M6 x 1 10 40 52.5 M6 x 1 10 50 54 M8 x 1.25 14 MIW MIS B + Stroke R R * Dimensions other than those shown above are the same as the drawings above.

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

Air Slide Table Series MXQ

-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.

Special Applications: 10-AR (Clean Series), Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: None, Option: None

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: None, Option: None

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 01 [1/8 (Size 20)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: -

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: -, Option: -

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: -

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 01 [1/8 (Size 20)], Accessory, Not Attached: -, Option: -

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: G, Port Size: 01 [1/8 (Size 20)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: -

Special Applications: Clean Series, Body Size: 20, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: -

CY1

40 34 12 10 3 6.5 10 12 33 14 25.5 PA (N) JxK PB PW Q S ta tb TT T QW W Z LD L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA dimensions are for split from center.